초록 ▼

An independent dual-blade robot assembly is provided for use in semiconductor wafer processing. The robot assembly includes a rotatable stage located within a chamber, a linear track mounted on an upper surface of the rotatable stage, and article first and second motorized platens slidably mounted o

An independent dual-blade robot assembly is provided for use in semiconductor wafer processing. The robot assembly includes a rotatable stage located within a chamber, a linear track mounted on an upper surface of the rotatable stage, and article first and second motorized platens slidably mounted on the linear track and configured for movement along a longitudinal axis of the linear track. Each motorized platen is magnetically driven and carries an end effector which extends from a leading edge. The end effectors of the first and second motorized platens are preferably horizontally co-planar. The linear track may be a single track carrying both motorized platens, or two linear track sections may be provided where each carries a single motorized platen. The two track sections may be pivotally or rotatably connected to the rotatable stage.

대표청구항 ▼

[ I claim:] [1.] A method for transferring articles using an article transfer apparatus located in a central transfer chamber, the method comprising the steps of:transferring a first article between the transfer chamber and one of a plurality of adjacent chambers by moving a first article handling m

[ I claim:] [1.] A method for transferring articles using an article transfer apparatus located in a central transfer chamber, the method comprising the steps of:transferring a first article between the transfer chamber and one of a plurality of adjacent chambers by moving a first article handling means of said article transfer apparatus along a longitudinal axis of a linear track upon which said article handling means is mounted;transferring a second article, independent of said first article transfer, between the transfer chamber and one of said plurality of adjacent chambers by moving a second article handling means of said article transfer apparatus along the longitudinal axis of said linear track; andwherein said steps of moving said first article handling means and moving said second article handling means each include the step of sequentially connecting a power source to each one of a plurality of coils located in each of said first and second article handling means to create a magnetic effect between the first or second article handling means and said linear track.