초록 ▼

Silicon beads are produced by chemical vapor deposition (CVD) on seed particles generated internal to a CVD reactor. The reactor has multiple zones, including an inlet zone where beads are maintained in a submerged spouted bed and an upper zone where beads are maintained in a bubbling fluidized bed.

Silicon beads are produced by chemical vapor deposition (CVD) on seed particles generated internal to a CVD reactor. The reactor has multiple zones, including an inlet zone where beads are maintained in a submerged spouted bed and an upper zone where beads are maintained in a bubbling fluidized bed. A tapered portion of the upper zone segregates beads by size. Systems for inspecting, sorting and transporting product beads are also disclosed.

대표청구항 ▼

[ We claim:] [1.] A heated silicon deposition reactor system comprising:a plurality of silicon beads;a vessel having a wall which defines a chamber that contains the beads and defines a fluidizing inlet suitable for the injection of a gas to provide a single upwardly-directed fluidizing jet in the c

[ We claim:] [1.] A heated silicon deposition reactor system comprising:a plurality of silicon beads;a vessel having a wall which defines a chamber that contains the beads and defines a fluidizing inlet suitable for the injection of a gas to provide a single upwardly-directed fluidizing jet in the chamber to fluidize the beads, the chamber having at least two zones including (a) an inlet zone that contains the fluidizing jet and that is configured to contain beads in a submerged spouted bed when gas is being injected through the fluidizing inlet, and (b) an upper zone that communicates with and is located above the inlet zone to receive gas moving upwardly from the inlet zone and that is sized and shaped to contain beads in a bubbling fluidized bed; anda source of the gas, the source being operable to supply a silicon-bearing gas to the inlet at a velocity sufficient to form the single upwardly-directed fluidizing jet and to maintain the beads in the inlet zone in the submerged spouted bed.