초록 ▼

A high throughput ion implantation system that rapidly and efficiently processes large quantities of flat panel displays. The ion implantation system has an ion source, an electrode assembly, a platform mounting a workpiece, and a ion beam measuring structure. The ion source in conjunction with the

A high throughput ion implantation system that rapidly and efficiently processes large quantities of flat panel displays. The ion implantation system has an ion source, an electrode assembly, a platform mounting a workpiece, and a ion beam measuring structure. The ion source in conjunction with the electrode assembly forms an ion beam in the shape of a ribbon beam. The ion beam is formed and directed such that a first portion of the ion beam treats the workpiece while a second portion of the ion beam is contemporaneously measured by the beam measuring structure. A controller obtains data from the beam measuring structure on the ion beam's parameters, and then generates control signals to the ion implantation system in response to the data.

대표청구항 ▼

[ Having described the invention, what is claimed as new and desired to be secured by letters patent is:] [1.] An apparatus for treating a workpiece by directing an ion beam at the workpiece, the apparatus comprisingan ion source for producing the ion beam extending along a beam path,an electrode as

[ Having described the invention, what is claimed as new and desired to be secured by letters patent is:] [1.] An apparatus for treating a workpiece by directing an ion beam at the workpiece, the apparatus comprisingan ion source for producing the ion beam extending along a beam path,an electrode assembly for directing the ion beam towards the workpiece,a platform mounting the workpiece, the platform being oriented such that a first portion of the ion beam treats the workpiece and a second portion of the ion beam extends beyond the edge of the workpiece, andbeam measuring means adapted for measuring parameters of the second portion of the ion beam contemporaneous with the treatment of the workpiece.