초록 ▼

The liquid cooled trap for effectively and efficiently collecting condensable vapor in a chemical vapor reaction system includes two stages. The first stage includes an entrance area to the trap that is purposely designed to be large in space and a very poor heat exchanger in order to avoid condensa

The liquid cooled trap for effectively and efficiently collecting condensable vapor in a chemical vapor reaction system includes two stages. The first stage includes an entrance area to the trap that is purposely designed to be large in space and a very poor heat exchanger in order to avoid condensation and resulting solid deposits that could clog the entrance port to the trap. The second stage comprises a better heat exchanger to spread the condensation and deposits efficiently over a larger surface area and a longer flow path. The second stage is a very efficient heat exchanger to clean up and remove whatever small amount of the condensable vapor remains after the first stage of the trap. The second stage includes cooling coil tubes and cooling cones or fins to increase the overall efficiency of the trap be increasing the interior surfaces upon which the flowing condensable vapor can condense, while not significantly reducing the flow conductance of the trap.

대표청구항 ▼

[ The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:] [1.] In a trap for deposition of a material in a gas stream, said trap having an entrance for said gas stream and an exit for said gas stream wherein said gas enters said trap through s

[ The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:] [1.] In a trap for deposition of a material in a gas stream, said trap having an entrance for said gas stream and an exit for said gas stream wherein said gas enters said trap through said entrance at a first temperature and exits said trap through said exit at a second temperature that is lower than said first temperature such that there is a temperature drop of said gas stream in said trap between said entrance and said exit that results from transfer of energy from said gas stream to the trap and causes deposition of said material in said trap, the improvement comprising:a first elongated and generally cylindrical housing substantially enclosing a primary chamber and a second elongated and generally cylindrical housing substantially enclosing a scrubber chamber, wherein said entrance directs said gas stream into said primary chamber and said second housing is positioned in and substantially surrounded by said primary chamber such that said first housing is eccentric to said second housing, such that said second housing forms a first impact surface for the gas stream entering said primary chamber through said entrance, and such that a substantially unimpeded flow path between said entrance and said first impact surface exists for said gas stream entering said primary chamber through said entrance, further wherein said scrubber chamber has an inlet in said primary chamber through which said gas stream enters said scrubber chamber and an outlet in gas flow relation with said exit, a second impact surface positioned between said inlet and said outlet of said scrubber chamber, and cooling means connected to said second impact surface for maintaining said second impact surface at a temperature lower than said first temperature.