초록 ▼

A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased therma

A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.

대표청구항 ▼

[ What is claimed is:] [1.] A scanning probe microscope including a heated stage, said heated stage comprising:a support substrate having an upper surface and a lower surface, said upper surface adapted for supporting a sample under investigation by the scanning probe microscope;an electrically powe

[ What is claimed is:] [1.] A scanning probe microscope including a heated stage, said heated stage comprising:a support substrate having an upper surface and a lower surface, said upper surface adapted for supporting a sample under investigation by the scanning probe microscope;an electrically powered heating element thermally coupled to at least a portion of said lower surface of said support substrate;a thermally insulating support element engaged with said lower surface of said support substrate, said support element having a vertical thickness of L, said support element attached to the microscope at a plurality of peripheral points;at least one generally torroidally-shaped void in said support element disposed so as to increase the distance within said support element between said heating element and said peripheral points to at least about 2 L or greater.