초록 ▼

A method and apparatus for leak testing an article in which an evacuable test chamber and a mass spectrometer leak detector are provided. The conduit links the test chamber and the mass spectrometer. A first valve is provided nearer the test chamber and a second valve is provided nearer the leak det

A method and apparatus for leak testing an article in which an evacuable test chamber and a mass spectrometer leak detector are provided. The conduit links the test chamber and the mass spectrometer. A first valve is provided nearer the test chamber and a second valve is provided nearer the leak detector for controlling the flow through the conduit and for defining between the valves the trapped volume that is associated with the conduit. The trapped volume is evacuated with the first valve closed and the second valve opened. The pressure differential between the first point situated intermediate the first valve and the test chamber is measured and a second point situated intermediate the second valve and the leak detector is measured. The pressure differential between the first and second points is measured and a pressure differential reference point is determined. The second valve is closed to form the trapped volume and the first valve is opened to communicate the trapped volume and the evacuation chamber. The pressure differential between the first and secondpoints is then measured and compared with the pressure differential reference point. The rate of change of the pressure differential is measured between the first and second points subsequent to the communication of the trapped volume and the test chamber. The second valve is opened to allow further evacuation purging of the chamber and the conduit.

대표청구항 ▼

[ I claim:] [1.] A method for leak testing an article, the method comprising;placing the article within an evacuable test chamber;providing means for evacuating the chamber;providing conduit means linking the chamber and the evacuating means;providing a first valve means and a second valve means for

[ I claim:] [1.] A method for leak testing an article, the method comprising;placing the article within an evacuable test chamber;providing means for evacuating the chamber;providing conduit means linking the chamber and the evacuating means;providing a first valve means and a second valve means for controlling flow through the conduit means and for defining therebetween a trapped volume associated with the conduit means the first valve means being located between the chamber and the trapped volume, the second valve means being located between the trapped volume and the evacuating means;evacuating the trapped volume with the first valve means closed and the second valve means open;providing means to measure the pressure differential between a first point situated intermediate the first valve means and the chamber and a second point situated intermediate the second valve means and the evacuation means;measuring the pressure differential between the first and second points and determining a pressure differential reference point;closing the second valve means to form the trapped volume;opening the first valve means to communicate the trapped volume and the chamber;measuring the pressure differential between the first and second points and comparing it with the pressure differential reference point;measuring the rate of change of the pressure differential between the first and second points subsequent to the communication of the trapped volume and the chamber; andopening the second valve means to allow further evacuation and purging of the chamber and the conduit means.