초록 ▼

A workpiece is heated by first forming an ionized gas plasma around the workpiece. A positive potential is applied to the workpiece to accelerate electrons from the plasma into the workpiece. The workpiece is uniformly surface heated by the energy directed into the workpiece by the electrons. The wo

A workpiece is heated by first forming an ionized gas plasma around the workpiece. A positive potential is applied to the workpiece to accelerate electrons from the plasma into the workpiece. The workpiece is uniformly surface heated by the energy directed into the workpiece by the electrons. The workpiece is cooled by providing a flow of a pressurized liquid material such as carbon dioxide having a triple point. The liquid material is expanded through a nozzle to form solid particles that contact the surface of the workpiece and remove heat from it by subliming.

대표청구항 ▼

[ What is claimed is:] [1.] Apparatus for heat treating a workpiece, comprising:a vacuum chamber;means for controllably evacuating the vacuum chamber;means for controllably supplying a partial pressure of an ionizing gas to the interior of the vacuum chamber;means for providing a plasma within the v

[ What is claimed is:] [1.] Apparatus for heat treating a workpiece, comprising:a vacuum chamber;means for controllably evacuating the vacuum chamber;means for controllably supplying a partial pressure of an ionizing gas to the interior of the vacuum chamber;means for providing a plasma within the vacuum chamber, the means for applying a plasma having a plasma-source anode which is not the workpiece;an electrically isolated support for the workpiece to be heat treated; andmeans for applying a pulsing positive voltage to the workpiece relative to the plasma, the means for applying a pulsing positive voltage having as a pulsing anode the workpiece, wherein the plasma-source anode is separate and distinct from the pulsing anode, and wherein the means for applying a pulsing positive voltage operates independently of the means for providing a plasma.