초록 ▼

A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The invention provides for the independent control of

A liquid vaporizer apparatus and method for chemical vapor deposition of liquid solutions into a controlled atmosphere of a CVD reaction chamber. The apparatus comprises an atomizer, gas curtain, heated porous media disks and a carrier gas mixer. The invention provides for the independent control of temperature, pressure and precursor stoichiometry during the atomizing and vaporization process thereby rendering the precise precursor vapor quality and quantity required for a given application. The invention employs the use of removable porous media disks which may be varied according to the desired operating pressure and precursors. In operation, the apparatus provides for a liquid precursor to first be atomized into a mist using an ultrasonic nozzle, then vaporized by heated media disks, and mixed with a carrier gas, then forced into CVD reaction chamber.

대표청구항 ▼

[ What is claimed is:] [1.] A modular liquid vaporizing apparatus comprising a housing including at least one liquid precursor supply inlet and at least one vapor outlet, a removable ultrasonic module sized for removable insertion and replacement in said housing at a location with respect to said at

[ What is claimed is:] [1.] A modular liquid vaporizing apparatus comprising a housing including at least one liquid precursor supply inlet and at least one vapor outlet, a removable ultrasonic module sized for removable insertion and replacement in said housing at a location with respect to said at least one liquid precursor supply inlet, whereby said ultrasonic module can convert said at least one liquid precursor to an atomized mist, a removable heatable contact surface sized for removable insertion and replacement in said housing at a location with respect to said removable ultrasonic module whereby said heatable contact surface can vaporize said atomized mist by direct contact therewith, said housing including curtain gas entry means for supplying an unheated curtain gas to said housing for preventing said atomized mist from contacting the inner walls of said housing and for preventing vaporization of said atomized mist prior to contact with said removable heatable contact surface and for transporting said atomized mist to said removable heatable contact surface, whereby a vapor can be supplied from said at least one vapor outlet.