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Building blocks for integrated gas panel 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-011/00
출원번호 US-0760150 (1996-12-03)
발명자 / 주소
  • Markulec Jeffrey R.
  • Rex Dennis G.
  • Schuster Richard E.
  • Elliot Brent D.
출원인 / 주소
  • Insync Systems, Inc.
인용정보 피인용 횟수 : 68  인용 특허 : 7

초록

A gas panel comprising a plurality of discreet blocks. The gas panel of the present invention includes a first functional component coupled to a first face of a first block wherein the first face has a first port configuration. A second functional component coupled to a first face of a second block

대표청구항

[ We claim:] [10.] A gas panel comprising a plurality of interconnected blocks comprising:a first block comprising:a first face;a second face adjacent to said first face;a third face opposite said second face;a fourth face opposite said first face;a first port and a second port formed in said first

이 특허에 인용된 특허 (7)

  1. West Robert E. (3200 Carlisle ; NE. ; Ste. 217 Albuquerque NM 87110), Fault tolerant fluid flow apparatus.
  2. Okumura Katsuya (Yokohama JPX) Sudo Yoshihisa (Niiza JPX) Goshima Kenichi (Kasugai JPX) Itafuji Hiroshi (Kasugai JPX) Kojima Akihiro (Kasugai JPX), Gas supplying system and gas supplying apparatus.
  3. Kolibas James A. (Broadview Heights OH), Modular color changers with improved valves and manifolds.
  4. Caughran James W. (Lodi CA), Modular gas box system.
  5. Schaefer Joseph H. (Grafton WI), Modular pneumatic control systems.
  6. Moriya Shuji (Yamanashi JPX) Matsuo Takenobu (Kofu JPX) Wakabayashi Tsuyoshi (Kofu JPX), Processing apparatus and flow control arrangement therefor.
  7. Goedecke Wolf-Dieter (Unterkirnach DEX), Valve base plate assembly.

이 특허를 인용한 특허 (68)

  1. Burkhart, Christopher William; Lee, Andrew C., Additively manufactured gas distribution manifold.
  2. Burkhart, Christopher William; Lee, Andrew C.; Hemker, David J., Additively manufactured gas distribution manifold.
  3. Hollingshead J. Gregory, Apparatus for assembling modular chemical distribution substrate blocks.
  4. Ohishi Yuuji,JPX ; Takahashi Hideaki,JPX ; Otsuka Yukinori,JPX, Automotive hydraulic modulator.
  5. Ohishi Yuuji,JPX ; Takahashi Hideaki,JPX ; Otsuka Yukinori,JPX, Automotive hydraulic modulator.
  6. Markulec Jeffrey R. ; Rex Dennis G. ; Schuster Richard E. ; Elliot Brent D., Building blocks for integrated gas panel.
  7. Taskar, Mark; Shareef, Iqbal, Configuration independent gas delivery system.
  8. Vu, Kim Ngoc, Extreme flow rate and/or high temperature fluid delivery substrates.
  9. Vu, Kim Ngoc, Fluid delivery substrates for building removable standard fluid delivery sticks.
  10. Harris, James M.; Michael, Selser J., Fluid delivery system and mounting panel therefor.
  11. Vu, Kim Ngoc, Fluid flow system.
  12. Johnson, Kenneth Alan, Fluid handling port array.
  13. Yasuda, Tadahiro, Fluid mechanism, support member constituting fluid mechanism and fluid control system.
  14. Yasuda, Tadahiro, Fluid mechanism, support member constituting fluid mechanism and fluid control system.
  15. Shareef, Iqbal A.; Taskar, Mark, Fluid mixing hub for semiconductor processing tool.
  16. Eriksson, Mark L.; Rex, Dennis, Fluid transport in monolithic structures.
  17. Eriksson, Mark L.; Rex, Dennis, Fluid transport in monolithic structures.
  18. Huston, Joel; Tobin, Jeffery; Marcadal, Christophe, Gas coupler for substrate processing chamber.
  19. Carnell, Todd M.; Hoffman, Brian J.; Newkirk, David C., Gas distribution assembly.
  20. Kang, Michael; Paterson, Alex, Gas distribution system for ceramic showerhead of plasma etch reactor.
  21. Milburn,Matthew L., Gas-panel assembly.
  22. Milburn,Matthew L., Gas-panel assembly.
  23. Milburn,Matthew L., Gas-panel assembly.
  24. Milburn,Matthew L.; Wier,Bruce C., Gas-panel assembly.
  25. Maher Joseph, Integrated gas delivery system.
  26. Oya, Kazuhiro; Hayashi, Tatsuya, Integrated gas panel apparatus.
  27. Oya, Kazuhiro; Hayashi, Tatsuya, Integrated gas panel apparatus.
  28. DiPrizio, Anthony C.; Abbott, Nathan; Vroman, Christopher; Patel, Rajnikant B.; McNamara, Eric, Low-profile surface mount filter.
  29. DiPrizio, Anthony; Abbott, Nathan; Vroman, Christopher; Patel, Rajnikant B.; McNamara, Eric, Low-profile surface mount filter.
  30. DiPrizio, Anthony; Abbott, Nathan; Vroman, Christopher; Patel, Rajnikant B.; McNamara, Eric, Low-profile surface mount filter.
  31. Eriksson, Mark L., MSM component and associated gas panel assembly.
  32. Eriksson, Mark L., MSM component and associated gas panel assembly.
  33. Dennis J. Gallant ; John W. Ruehl ; John C. Gray ; Edward W. Catton ; Jerome B. Batta, Manifold and regulator apparatus.
  34. Gallant Dennis J. ; Ruehl John W. ; Gray John C. ; Catton Edward W. ; Batta Jerome B., Manifold and regulator apparatus.
  35. Manofsky, Jr., William L.; Redemann, Eric J.; Julian, Donald H., Manifold system for gas and fluid delivery.
  36. Crockett, Mark; Lane, John W.; Kirchhoff, Vincent; Josephson, Marcel E.; Gao, Hong P.; Manjunath, Bhaswan, Method of diffusion bonding a fluid flow apparatus.
  37. Christoph Hettinger DE, Modular analysis control block.
  38. J. Gregory Hollingshead, Modular chemical delivery blocks.
  39. Reid, II,Kenneth Edward; Ruiz,Frank Anthony; Wang,Claire, Modular component connector substrate assembly system.
  40. Curran William J. ; Shigemoto Hiromi Dick ; Annett John ; Amores Lope M., Modular fluid handling assembly and modular fluid handling units with double containment.
  41. Mayeaux, Donald P., Modular sample conditioning system.
  42. Vu,Kim, Modular substrate gas panel having manifold connections in a common plane.
  43. Vu,Kim Ngoc, Modular substrate gas panel having manifold connections in a common plane.
  44. Perusek, Robert V.; Hasak, David J.; Kalata, Gregory S.; Nordstrom, Douglas A.; Maruna, Timothy, Modular surface mount fluid system.
  45. Perusek,Robert V.; Hasak,David J.; Kalata,Gregory S.; Nordstrom,Douglas A.; Maruna,Timothy, Modular surface mount fluid system.
  46. Eidsmore, Paul E., Modular surface mount manifold.
  47. Eidsmore, Paul E., Modular surface mount manifold.
  48. Eidsmore, Paul E., Modular surface mount manifold.
  49. Eidsmore,Paul E., Modular surface mount manifold.
  50. Eidsmore,Paul G., Modular surface mount manifold.
  51. Eidsmore, Paul G.; Mohlenkamp, Michael J.; Olechnowicz, Benjamin J.; Schilt Deines, Christine M.; Nordstrom, Douglas; McCoy, James, Modular surface mount manifold assemblies.
  52. Eidsmore, Paul G.; Mohlenkamp, Michael J.; Olechnowicz, Benjamin J.; Schilt Deines, Christine M.; Nordstrom, Douglas; McCoy, James, Modular surface mount manifold assemblies.
  53. Eidsmore,Paul G.; Mohlenkamp,Michael J.; Olechnowicz,Benjamin J.; Schilt Deines,Christine M.; Nordstrom,Douglas; McCoy,James, Modular surface mount manifold assemblies.
  54. Kellogg, Michael C.; Lee, Andrew C.; Pena, Christopher J., Monolithic manifold mask and substrate concepts.
  55. Markulec Jeffrey R. ; Rex Dennis G. ; Schuster Richard E. ; Elliot Brent D., Mounting plane for integrated gas panel.
  56. Eriksson Mark L., Precision clamping device.
  57. Chapman, Paul R.; Childers, Robert W.; Hecht, Gideon; Wellings, Anders, Pressure manifold system for dialysis.
  58. Itafuji Hiroshi,JPX ; Inagaki Toshiyasu,JPX, Process gas supply unit.
  59. Itoh Masahito,JPX ; Inagaki Toshiyasu,JPX, Process gas supply unit.
  60. Itoh Masahito,JPX ; Inagaki Toshiyasu,JPX ; Ueta Minoru,JPX ; Yada Masahiko,JPX ; Itafuji Hiroshi,JPX, Process gas supply unit.
  61. Eriksson, Mark L.; Markulec, Jeffry R.; Rex, Dennis G., Shear-resistant modular fluidic blocks.
  62. Eriksson,Mark L.; Markulec,Jeffry R.; Rex,Dennis G., Shear-resistant modular fluidic blocks.
  63. Duret Michael J. ; Hasenkamp Erin Martin ; Markulec Jeffrey R. ; Rex Dennis G. ; Schuster Richard E., Sieve like structure for fluid flow through structural arrangement.
  64. Bower,Michael Joseph; Chase,Roger Dean, Surface mount heater.
  65. Bower,Michael Joseph; Chase,Roger Dean, Surface mount heater.
  66. Vu Kim Ngoc, System of modular substrates for enabling the distribution of process fluids through removable components.
  67. Hollingshead J. Gregory, Unified modular multi-directional flow chemical distribution block.
  68. Pinto James V., Welded interconnection modules for high purity fluid flow control applications.
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