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In a source for the generation of large-area pulsed ion or electron beams from an anode discharge electrode which has openings receiving discharge electrodes forming a vacuum arc plasma source, the discharge is safely triggered by a load which determines the total current and which consists of a par

In a source for the generation of large-area pulsed ion or electron beams from an anode discharge electrode which has openings receiving discharge electrodes forming a vacuum arc plasma source, the discharge is safely triggered by a load which determines the total current and which consists of a parallel circuit including an ohmic resistor and a capacitor wherein the load output is adapted to the internal resistance of the pulse voltage generator. With a dimensioning of the electrical components taking into consideration given limits, a homogeneous beam of charged particles is obtained wherein the particle composition can be all the same or a homogeneous mixture of different particles depending on the choice of electrode materials.

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[ What is claimed is:] [1.] A source for the generation of large area pulsed ion or electron beams, comprising: a vacuum containment, a vacuum arc plasma source with an expansion space and an extraction system disposed in said containment, said arc plasma source consisting of a predetermined arrange

[ What is claimed is:] [1.] A source for the generation of large area pulsed ion or electron beams, comprising: a vacuum containment, a vacuum arc plasma source with an expansion space and an extraction system disposed in said containment, said arc plasma source consisting of a predetermined arrangement of wire electrodes connected to a current collector rail by way of parallel resistors (R.sub.o) and a plate-like anode discharge electrode having an arrangement of openings disposed at a distance (.DELTA.) from each other, each receiving an end of one of said wire electrodes such that said wire electrodes are centered within said openings, an anode grid (AG) disposed at a distance (D) from said anode discharge electrode and being electrically connected, by way of an anode resistor (R.sub.AG), to said anode discharge electrode such that, under consideration of the limit EQU R.sub.AG >>Te/eI.sub.io (1-.alpha.),(Te--electron temperature in the plasma, e=electron elementary charge, I.sub.io =ion saturation current; .alpha.=anode grid transparency) d anode grid (AG) assumes the floating potential of an anode plasma generated by said wire electrodes in said anode discharge electrode, said current collector rail being electrically connected, by way of a parallel circuit including a condenser (C.sub.A) and a resistor (R.sub.A), to said vacuum containment for a secure triggering of the arc discharge between the wire electrodes and the anode discharge electrode and for the control of the ion flux, the dimensioning of the electrical components R.sub.o, R.sub.A, C.sub.A being subjected to the limitation EQU T/[(R.sub.A +R.sub..PI.)/R.sub.A .times.R.sub..PI. ]>>C.sub.A >>T/[(R.sub.A +R.sub..PI.)/RA.times.R.sub..PI. ] reinR.sub..PI. =R.sub.o /n and .DELTA.