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Oriented diamond film structures on nondiamond substrates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-025/02
출원번호 US-0474398 (1995-06-06)
발명자 / 주소
  • Zhu Wei
  • Yang Peichun
  • Glass Jeffrey T.
출원인 / 주소
  • North Carolina State University
대리인 / 주소
    Myers, Bigel, Sibley & Sajovec, L.L.P.
인용정보 피인용 횟수 : 39  인용 특허 : 10

초록

A method for making an oriented diamond film includes the steps of saturating a surface region of a transition metal substrate, capable of dissolving carbon, with carbon and hydrogen; forming oriented diamond nuclei on the saturated surface region of the substrate; and growing diamond on the oriente

대표청구항

[ That which is claimed is:] [1.] A microelectronic structure comprising:a substrate comprising a transition metal capable of dissolving carbon;a surface region on the transition metal substrate comprising transition metal-carbon-hydrogen states; andan oriented diamond film on said surface region wh

이 특허에 인용된 특허 (10)

  1. Gasworth Steven M. (Scotia NY), Diamond crystal growth process.
  2. Kirkpatrick Allen R. (Lexington MA), Diamond films and method of growing diamond films on nondiamond substrates.
  3. Purdes Andrew J. (Garland TX), Diamond growth method.
  4. Bension Rouvain M. (310 Summit Ave. Brookline MA 02146) Truesdale Larry K. (27 Wetherill La. Chester Springs PA 19425), Initiation and bonding of diamond and other thin films.
  5. Yang Peichun (Raleigh NC) Zhu Wei (Raleigh NC) Glass Jeffrey T. (Apex NC), Method for fabricating diamond films on nondiamond substrates and related structures.
  6. Purdes Andrew J. (Garland TX) Celii Francis G. (Dallas TX), Method for forming patterned diamond thin films.
  7. Pinneo John M. (Woodside CA), Method for suppressing growth of graphite and other non-diamond carbon species during formation of synthetic diamond.
  8. Morrish Arthur A. (LaPlata MD) Natishan Paul M. (Annapolis MD) Carrington William A. (Foster City CA), Method of growing diamond film on substrates.
  9. Nicholas Michael G. (6 ; Bryan Way Wantage ; Berkshire EN) Scott Peter M. (“Skagway”Peasemore ; Newbury ; Berkshire EN) Dewar Bruce I. (43 Walmer Street Sydenham ; Johannesburg ; 2001 ZA), Method of producing nickel coated diamond particles.
  10. Kojima Toshinori (Musashino JPX) Matsukata Masahiko (Tokyo JPX) Ozawa Eiichi (Katsushika JPX) Friedt Jean-Marie (Funakawara JPX), Process for the elaboration of powders uniformly coated with ultrafine silicon-base particles using chemical vapor decom.

이 특허를 인용한 특허 (39)

  1. Hoover,David S.; Petkie,Ronald R., CVD diamond enhanced microprocessor cooling system.
  2. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Coated article including a DLC inclusive layer(s) and a layer(s) deposited using siloxane gas, and corresponding method.
  3. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S.; Thomas, Kurt, Faucet.
  4. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  5. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  6. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  7. Brondum, Klaus, Faucet with wear-resistant valve component.
  8. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  9. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  10. Veerasamy, Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  11. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo ; Thomsen Scott V., Hydrophobic coating including DLC and/or FAS on substrate.
  12. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
  13. Veerasamy Vijayen S. ; Petrmichl Rudolph Hugo, Hydrophobic coating with DLC & FAS on substrate.
  14. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Low-E coating system including protective DLC.
  15. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
  16. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of deposition DLC inclusive layer(s) using hydrocarbon and/or siloxane gas(es).
  17. Welty,Richard P.; Brondum,Klaus; Richmond,Douglas S.; Jonte,Patrick B., Method of forming a wear resistant component.
  18. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of ion beam milling a glass substrate prior to depositing a coating system thereon, and corresponding system for carrying out the same.
  19. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of ion beam milling substrate prior to depositing diamond like carbon layer thereon.
  20. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo, Method of making a coated article including DLC and FAS.
  21. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Method of making coated article including DLC inclusive layer over low-E coating.
  22. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Method of making coated article including diamond-like carbon (DLC) and FAS.
  23. Veerasamy, Vijayen S., Method of making coated article including layer(s) of diamond-like carbon which may be hydrophobic.
  24. Veerasamy, Vijayen S., Method of making coating article including carbon coating on glass.
  25. Veerasamy,Vijayen S., Method of making heat treatable coated article with diamond-like carbon (DLC) inclusive layer.
  26. Veerasamy, Vijayen S., Method of making heat treatable coated article with protective layer.
  27. Anton, Bryce; Welty, Richard P.; Sullivan, Patrick, Method of producing an article having patterned decorative coating.
  28. Petkie, Ronald, Methods for preparing brazeable metallizations for diamond components.
  29. Vail, Michael A.; Bertagnolli, Kenneth E., Methods of fabricating polycrystalline diamond by carbon pumping and polycrystalline diamond products.
  30. Ravi, Kramadhati V.; Garner, Michael C., Methods of forming a high conductivity diamond film and structures formed thereby.
  31. Ravi,Kramadhati V.; Garner,Michael C., Methods of forming a high conductivity diamond film and structures formed thereby.
  32. Ravi,Kramadhati V.; Garner,Michael C., Methods of forming a high conductivity diamond film and structures formed thereby.
  33. Veerasamy, Vijayen S.; Petrmichl, Rudolph Hugo; Thomsen, Scott V., Solar management coating system including protective DLC.
  34. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl ; Scott V. Thomsen, Solar management coating system including protective DLC.
  35. Randy S. Cannon ; Kevin G. Graham, Synthetic gasket material.
  36. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
  37. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
  38. Welty,Richard P.; Brondum,Klaus; Richmond,Douglas S.; Jonte,Patrick B., Valve component with improved wear resistance.
  39. Welty, Richard P.; Brondum, Klaus; Richmond, Douglas S.; Jonte, Patrick B., Valve component with multiple surface layers.
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