초록 ▼

A scheme for monitoring the performance of a gas-phase filter in which upstream and downstream detection surfaces are exposed to upstream and downstream air so that molecular contamination may respectively form non-volatile residue thereon, and the performance of the air filter is determined based o

A scheme for monitoring the performance of a gas-phase filter in which upstream and downstream detection surfaces are exposed to upstream and downstream air so that molecular contamination may respectively form non-volatile residue thereon, and the performance of the air filter is determined based on the ratio of the amount of non-volatile residue respectively forming on the upstream and downstream detection surfaces. In another embodiment, a first electrical signal is provided representative of the amount of non-volatile residue forming on the upstream detection surface, a second electrical signal is provided representative of the amount of non-volatile residue forming on the downstream detection surface, and the performance of the air filter is determined in real-time based on the first and second electrical signals that are provided. The detection surfaces of the upstream and downstream detectors may be selected so that the mass of non-volatile residue forming thereon may be determined, either in real-time or by subsequent chemical analysis.

대표청구항 ▼

[ What is claimed is:] [1.] A method for monitoring the performance of a gas-phase filter positioned in an air stream, which may be subject to molecular contamination, and useful for removing molecular contamination therefrom, the method comprising the steps of:exposing an upstream detection surface

[ What is claimed is:] [1.] A method for monitoring the performance of a gas-phase filter positioned in an air stream, which may be subject to molecular contamination, and useful for removing molecular contamination therefrom, the method comprising the steps of:exposing an upstream detection surface to the airstream at a location upstream of the air filter so that a variety of upstream molecular contaminants may form non-volatile residue on the exposed upstream detection surface over time;exposing a downstream detection surface to the airstream at a location downstream of the air filter so that a variety of downstream molecular contaminants may form a non-volatile residue on the exposed downstream detection surface over time;determining the mass of non-volatile residue respectively formed on the exposed upstream and downstream detection surfaces; anddetermining the performance of the air filter based on the ratio of the determined mass of non-volatile residue respectively formed on the exposed upstream and downstream detection surfaces.