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Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-003/14
출원번호 US-0761336 (1996-12-10)
발명자 / 주소
  • Veerasamy Vijayen
  • Weiler Manfred,DEX
  • Li Eric
출원인 / 주소
  • Akashic Memories Corporation
대리인 / 주소
    Townsend and Townsend and Crew LLP
인용정보 피인용 횟수 : 116  인용 특허 : 11

초록

The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp.sup.3

대표청구항

[ What is claimed is:] [1.] A method for producing magnetic recording media, the method comprising:forming a magnetic layer over a substrate;supporting the substrate in a deposition chamber;ionizing a source material in a plasma chamber so as to form a plasma containing ions which comprise carbon; a

이 특허에 인용된 특허 (11)

  1. Rabalais John W. (Houston TX) Kasi Srinandan R. (Houston TX), Chemically bonded diamond films and method for producing same.
  2. Dorfman Veniamin (8 Norman Dr. Shoreham NY 11786) Pypkin Boris (Moscow RUX), Diamond-like metallic nanocomposites.
  3. Winters Harold F. (San Jose CA) Chapman Brian N. (Mahopac NY), Etching method employing radiation and noble gas halide.
  4. Grill Alfred (White Plains NY) Patel Vishnubhai V. (Yorktown Heights NY), Fluorinated diamond-like carbon protective coating for magnetic recording media devices.
  5. Campbell Gregor (Glendale CA) Conn Robert W. (Los Angeles CA) Shoji Tatsuo (Nagoya JPX), High density plasma deposition and etching apparatus.
  6. Oechsner Hans (Vogelweher Strasse 7 B D-6750 Kaiserslautern DEX), High-frequency ion source.
  7. Murai Mikio (Hirakata JPX) Takahashi Kiyoshi (Ibaraki JPX) Odagiri Masaru (Kawanishi JPX) Kai Yoshiaki (Neyagawa JPX) Suzuki Takashi (Takatsuki JPX) Kunieda Toshiaki (Mino JPX), Magnetic recording medium and method for making it.
  8. Oechsner Hans (Vogelweher Strasse 7 B D-6750 Kaiserslautern DEX), Mthod for the surface treatment of semiconductors by particle bombardment.
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  10. Tsuchimoto ; Takashi, Plasma processor.
  11. Rabalais John W. (Houston TX) Kasi Srinandan R. (Croton-On-Hudson NY), Process for the deposition of diamond films using low energy, mass-selected ion beam deposition.

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  105. Ward, Arlen K.; Sartor, Joe D., System and method for biofilm remediation.
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