초록 ▼

A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a total level of metal impurity below about 10 ppm, preferably below about 5 ppm, and most preferably having a level of metal impurity below the

A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a total level of metal impurity below about 10 ppm, preferably below about 5 ppm, and most preferably having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy for the metals Ag, Al, Ba, Be, Ca, Cd, Co, Cr, Cu, K, Mg, Mn, Mo, Na, Ni, P, Pb, Sr and Zn. A crucible susceptor for a crystal growing process for pulling a crystal ingot from a crystal material melt in a crucible comprises a high purity composite comprising a two dimensional, continuously woven carbon fiber fabric reinforced carbon matrix; the high purity composite having a total level of metal impurity less than about 10 parts per million; the crucible susceptor being a one piece, ply lay-up structure of said high purity composite, having a side ring and a base, said side ring and said base having substantially the same thickness.

대표청구항 ▼

[ We claim:] [1.] A crucible susceptor for a crystal growing process for pulling a crystal ingot from a crystal material melt in a crucible, comprising:a high purity composite comprising a two dimensional, continuously woven carbon fiber fabric reinforced carbon matrix;said high purity composite hav

[ We claim:] [1.] A crucible susceptor for a crystal growing process for pulling a crystal ingot from a crystal material melt in a crucible, comprising:a high purity composite comprising a two dimensional, continuously woven carbon fiber fabric reinforced carbon matrix;said high purity composite having a total level of metal impurity less than about 10 parts per million;said crucible susceptor being a one piece, ply lay-up structure of said high purity composite, having a side ring and a base, said side ring and said base having substantially the same thickness.