초록 ▼

A microstructure includes a substrate and a movable platform which is tethered by a first cantilever arm to the substrate. The first cantilever arm is comprised of a sandwich of first and second materials, the first and second materials exhibiting either different thermal coefficients of expansion o

A microstructure includes a substrate and a movable platform which is tethered by a first cantilever arm to the substrate. The first cantilever arm is comprised of a sandwich of first and second materials, the first and second materials exhibiting either different thermal coefficients of expansion or a piezoelectric layer. A second cantilever arm includes a first end which is tethered to the platform and a free distal end which is positioned to engage the substrate. The second cantilever arm is constructed similarly to the first cantilever arm. A controller enables movement of the platform through application of signals to both the first cantilever arm and the second cantilever arm to cause flexures of both thereof. The second cantilever arm, through engagement of its free end with the substrate, aids the action of the first cantilever arm in moving the platform. Further embodiments include additional cantilever arms which are independently controllable to enable multiple ranges of movement of the platform by selective actuation of the cantilever arms; and plural opposed cantilever arms that are connected between the substrate and the platform, but are independently controllable to achieve complex modes of movement of the platform. A further embodiment includes plural actuation regions within each cantilever arm to enable countermovements of each cantilever arm to be achieved.

대표청구항 ▼

[ We claim:] [1.] A microstructure comprising:a substrate:a platform;a first cantilever arm having a proximal end connected to said substrate and a distal end connected to said platform at a first side thereof, said first cantilever arm comprised of a sandwich of a first material layer and a second

[ We claim:] [1.] A microstructure comprising:a substrate:a platform;a first cantilever arm having a proximal end connected to said substrate and a distal end connected to said platform at a first side thereof, said first cantilever arm comprised of a sandwich of a first material layer and a second material layer;a second cantilever arm having a proximal end connected to said platform and a free distal end which is positioned to engage said substrate, said second cantilever arm comprised of a sandwich of said first material and said second material; andcontrol means enabling movement of said platform by applying signals to cause a differential movement of said first material layer and second material layer in both said first cantilever arm and said second cantilever arm and a resulting flexure of each thereof, said second cantilever arm, through movement of its free end with respect to said substrate, cooperating to move said platform with said first cantilever arm.