초록 ▼

A sealing structure 20 for forming a seal around a chuck 30 used to hold a substrate 45 having a peripheral edge 50. An actuated, position-adjustable, sealing diaphragm 165 is disposed along the peripheral edge of the substrate. The diaphragm has a conformal sealing surface 170 capable of forming a

A sealing structure 20 for forming a seal around a chuck 30 used to hold a substrate 45 having a peripheral edge 50. An actuated, position-adjustable, sealing diaphragm 165 is disposed along the peripheral edge of the substrate. The diaphragm has a conformal sealing surface 170 capable of forming a seal when pressed against the peripheral edge of the substrate 45. A diaphragm actuator 175 actuates the sealing diaphragm from (i) a first non-sealing position 180 in which the conformal sealing surface of the diaphragm is spaced apart from the substrate held on the chuck to form a gap 190 therebetween, to (ii) a second sealing position 185 in which the conformal sealing surface of the diaphragm presses against, and forms a seal with, the peripheral edge of the substrate.

대표청구항 ▼

[ What is claimed is:] [1.] A sealing structure for forming a seal around a chuck, the sealing structure comprising:(a) a chuck for holding a substrate having a peripheral edge;(b) an actuated, position-adjustable, sealing diaphragm disposed along the peripheral edge of the substrate, the diaphragm

[ What is claimed is:] [1.] A sealing structure for forming a seal around a chuck, the sealing structure comprising:(a) a chuck for holding a substrate having a peripheral edge;(b) an actuated, position-adjustable, sealing diaphragm disposed along the peripheral edge of the substrate, the diaphragm having a conformal sealing surface capable of forming a seal when pressed against the peripheral edge of the substrate; and(c) a diaphragm actuator for actuating the sealing diaphragm from (i) a first non-sealing position in which the conformal sealing surface of the diaphragm is spaced apart from the substrate held on the chuck to form a gap therebetween, to (ii) a second sealing position in which the conformal sealing surface of the diaphragm presses against, and forms a seal with, the peripheral edge of the substrate.