초록 ▼

A photoresist storage and supply device. The device includes a control unit for generating a number of on/off signals. A number of gas supply valves are open to let gas pass according to the on/off signals. A number of photoresist solution storage vessels store photoresist solution and receive the g

A photoresist storage and supply device. The device includes a control unit for generating a number of on/off signals. A number of gas supply valves are open to let gas pass according to the on/off signals. A number of photoresist solution storage vessels store photoresist solution and receive the gas from a corresponding gas supply valve. A buffer vessel receives the photoresist solution, under pressure of the gas, from a selected photoresist solution storage vessel. A liquid level sensor mounted on the buffer vessel detects the solution level in the buffer vessel and generates a control signal when the photoresist solution level in the buffer vessel is below a certain threshold. A gas exhaust valve is coupled to the control unit, and expels gas from inside the buffer vessel according to an on/off signal.

대표청구항 ▼

[ What is claimed is:] [5.] A photoresist solution storage and supply device, comprising:a control unit for generating first, second, third, and fourth on/off signals;a first gas supply valve having an outlet to which gas passes when the first gas supply valve is open, according to the first on/off

[ What is claimed is:] [5.] A photoresist solution storage and supply device, comprising:a control unit for generating first, second, third, and fourth on/off signals;a first gas supply valve having an outlet to which gas passes when the first gas supply valve is open, according to the first on/off signal;a first photoresist solution storage vessel, coupled to the first gas supply valve, for storing first photoresist solution;a second gas supply valve having an outlet to which the gas passes when the second gas supply valve is open, according to the second on/off signal;a second photoresist solution storage vessel, coupled to the second gas supply valve, for storing additional photoresist solution;a liquid dispensing valve having first and second inlets, wherein the first inlet is coupled to the first photoresist solution storage vessel for receiving the first photoresist solution and the second inlet is coupled to the second photoresist solution storage vessel for receiving the additional photoresist solution, and wherein either the first inlet or the second inlet is selected for fluid communication with the outlet, according to the third on/off signal, such that the outlet is enabled to provide selected photoresist solution;a buffer vessel for receiving the selected photoresist solution from the outlet of the liquid dispensing valve, and for storing the received photoresist solution, wherein the first photoresist solution is delivered from the first photoresist storage vessel to the buffer vessel, under pressure of the gas, when the first gas supply valve is open and the first inlet of the liquid dispensing valve is in fluid communication with the outlet of the liquid dispensing valve, and the additional photoresist solution is delivered from the second storage vessel to the buffer vessel, under pressure of the gas, when the second gas supply valve is open and the second inlet of the liquid dispensing valve is in fluid communication with the outlet of the liquid dispensing valve;a liquid level sensor mounted on the buffer vessel for detecting a level of the received photoresist solution in the buffer vessel and for generating a low-level control signal when the received photoresist solution level in the buffer vessel is below a predetermined low-level threshold; anda gas exhaust valve for expelling the gas from inside the buffer vessel, according to the fourth on/off signal.