초록 ▼

A pressure damping system for damping pressure perturbations incident to switching of switchable flow control means in a fluid flow circuit. The pressure surge damping system comprises a throttle valve in the circuit, with the throttle valve and switchable flow control means being constructed and ar

A pressure damping system for damping pressure perturbations incident to switching of switchable flow control means in a fluid flow circuit. The pressure surge damping system comprises a throttle valve in the circuit, with the throttle valve and switchable flow control means being constructed and arranged for selective adjustment of the throttle valve when the switchable flow control means is switched, to attenuate pressure perturbations incident to switching of the switchable flow control means. The pressure surge damping system of the invention may be employed in a multi-vessel oxidation system for the treatment of semiconductor effluent gas, or in other applications involving periodic or cyclic switched flows which generate an upstream-propagating pressure wave detrimental to an upstream process facility.

대표청구항 ▼

[ What is claimed is:] [1.] A pressure surge damping system for damping pressure perturbations incident to switching of cyclically switched flow control means in a fluid flow circuit, wherein the switching of the cyclically switched flow control means chances the direction or path of fluid flow in t

[ What is claimed is:] [1.] A pressure surge damping system for damping pressure perturbations incident to switching of cyclically switched flow control means in a fluid flow circuit, wherein the switching of the cyclically switched flow control means chances the direction or path of fluid flow in the fluid flow circuit, said pressure surge damping system comprising a throttle valve in said circuit, wherein the throttle valve and the cyclically switched flow control means are constructed and arranged for coordinated actuation comprising selective adjustment of the throttle valve in timed coordination with the switching of the cyclically switched flow control means, to suppress pressure perturbations incident to switching of the cyclically switched flow control means.