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Vibration cancellation apparatus

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16M-001/00
출원번호 US-0880640 (1997-06-23)
우선권정보 JP-0181473 (1996-06-21)
발명자 / 주소
  • Haga Takahide,JPX
  • Watanabe Katsuhide,JPX
출원인 / 주소
  • Ebara Corporation, JPX
대리인 / 주소
    Wenderoth, Lind & Ponack, L.L.P.
인용정보 피인용 횟수 : 29  인용 특허 : 7

초록

A compact vibration cancellation apparatus based on a combination of air springs and electromagnetic actuators with smaller power capacity enables an anti-vibration table to be maintained in a level position even when the center of gravity of the anti-vibration table moves a large distance because o

대표청구항

[ What is claimed is:] [1.] A vibration cancellation apparatus for isolating an anti-vibration table from floor vibration and for canceling vibration of an objective equipment on the anti-vibration table which produces a load on the anti-vibration table, said apparatus comprising:at least three elec

이 특허에 인용된 특허 (7)

  1. D\Annunzio Camille M. (Gaithersburg MD) Chassaing Charles E. (Raleigh NC), Active controller for the attenuation of mechanical vibrations.
  2. Andrianos Nikos P. (Pittsburgh PA), Active vibration reduction in apparatus with cross-coupling between control axes.
  3. Gale Michael T. (Wettswil CHX) Knop Karl H. (Zurich CHX), Dynamic accuracy X-Y positioning table for use in a high precision light-spot writing system.
  4. Yamaoka Fumiyuki (Kanagawa JPX) Sasaki Mitsuo (Kanagawa JPX), Electromagnetic suspension device.
  5. Rossetti Dino J. ; Jolly Mark R. ; Norris Mark A., Method and apparatus for non-model based decentralized adaptive feedforward active vibration control.
  6. Gonzalez Walter (Rancho Palos Verdes CA) Gniady John A. (Albuquerque NM), Optical table active leveling and vibration cancellation system.
  7. Schutten Herman P. (Whitefish Bay WI) Weiss Arnold (Minneapolis MN), Seismic isolation system with reaction mass.

이 특허를 인용한 특허 (29)

  1. Morisada, Masahiro, Active anti-vibration apparatus and exposure apparatus and device manufacturing method using the same.
  2. Hanagan, Linda M., Active floor vibration control system.
  3. Terpay, Gregory Weston; Zipfel, George G.; Welsh, William, Active system and method for vibration and noise reduction.
  4. Mayama,Takehiko, Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus.
  5. Wakui Shinji,JPX ; Mayama Takehiko,JPX ; Kato Hiroaki,JPX, Anti-vibration apparatus and anti-vibration method thereof.
  6. Hara, Hiromichi, Anti-vibration system for exposure apparatus.
  7. Hara, Hiromichi, Anti-vibration system for exposure apparatus.
  8. Korenaga,Nobushige, Anti-vibration technique.
  9. Atsusi Ooyama JP; Shinichi Sekiguchi JP; Keijiro Misu JP, Apparatus for controlling magnetic levitation system.
  10. Yukio Tokuda JP; Nobuyoshi Deguchi JP; Shigeyuki Uzawa JP; Yukio Takabayashi JP; Hiromichi Hara JP, Driving apparatus and exposure apparatus.
  11. Eriksen, Konrad; Kasalanati, Amarnath; Dorris, Andrew, Floor isolation system.
  12. Wang,Yu; Laskaris,Evangelos Trifon; Ranze,Richard Andrew, High field open MRI magnet isolation system and method.
  13. Wang,Yu; Laskaris,Evangelos Trifon; Ranze,Richard Andrew, High field open MRI magnet isolation system and method.
  14. Ivers Douglas E. ; Fowler Leslie P. ; Altieri Russell E. ; Buchner Stephen F., Isolation system for isolation tables and the like.
  15. Loopstra, Erik Roelof; Wijckmans, Maurice Willem Jozef Etiënne; Tousain, Robertus Leonardus; Koevoets, Adrianus Hendrik, Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatus.
  16. Cheng, Wen-da; Tsai, Chinlung, Measuring apparatus and controlling method thereof.
  17. Binnard, Michael, Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems.
  18. Cone, Michael, Method and system for optimizing the vibrational characteristics of a structure.
  19. Ebihara, Kenzo, Positioning apparatus mounted with vibration isolators and robot.
  20. Dai Yuzhong, Proactive shock absorption and vibration isolation.
  21. Tanner,Edward T., Self-powering shock, vibration and acoustic isolation system.
  22. Tanner, Edward T., Shock, vibration and acoustic isolation system.
  23. Tanner, Edward T., Shock, vibration and acoustic isolation system.
  24. Wakiyama Shigeru,JPX ; Fujino Naohiko,JPX, Surface analyzing apparatus with anti-vibration table.
  25. Kato, Hiroaki, VIBRATION DAMPING APPARATUS, CONTROL METHOD THEREFOR, EXPOSURE APPARATUS HAVING THE VIBRATION DAMPING APPARATUS, MAINTENANCE METHOD THEREFOR, SEMICONDUCTOR DEVICE FABRICATION METHOD, AND SEMICONDUCTO.
  26. Herren, Andrew James; Barron, Joel, Vibration and sound dampener for heavy machinery.
  27. Michael J. Radziun ; Scott T. Mansell ; David E. Dean ; Dewain A. Purgill, Vibration isolation apparatus for MR imaging system.
  28. Shibata, Yugo, Vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing device.
  29. Krajec Russell Steven, Vibration isolation platform.
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