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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Micropumps with fixed valves

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) F04B-017/00   
미국특허분류(USC) 417/322 ; 417/413.2 ; 137/814 ; 137/826 ; 137/833
출원번호 US-0401546 (1995-03-09)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Greenlee, Winner & Sullivan, P.C.
인용정보 피인용 횟수 : 224  인용 특허 : 9
초록

Micropumps fabricated by micromachining techniques and employing fixed or no-moving-parts valves. As one aspect of the invention, a laser-assisted chemical etching technique is employed for providing smooth-walled, curved configuration necessary to obtain the desired flow characteristics of the valves that are used in conjunction with the micropump.

대표
청구항
▼

[ The invention claimed is:] [1.] A method for making a micromachined pump comprising the steps of:forming a pump cavity in a base;forming in the base a first conduit having no moving parts and an inner end connected to the cavity and an outer end, the conduit conducting fluid flow between the inner and outer end along a flow path that departs from a straight line and wherein flow in said first conduit is characterized blow Reynolds numbers where flow is not turbulent,forming in the base a second conduit having no moving parts and an inner end connected ...

이 특허에 인용된 특허 (9)

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