초록

A highly reliable bulk chemical delivery system for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

대표청구항 ▼

[ We claim:] [1.] A high purity chemical refill system, comprising:a first metallic container for storing high purity chemicals, comprising an inlet port, an outlet port, and a first level sensor disposed within the first metallic container and generating at least a low level signal and a high level

[ We claim:] [1.] A high purity chemical refill system, comprising:a first metallic container for storing high purity chemicals, comprising an inlet port, an outlet port, and a first level sensor disposed within the first metallic container and generating at least a low level signal and a high level signal;a second metallic container for storing high purity chemicals, comprising an inlet port, an outlet port and a second level sensor disposed within the second metallic container and generating at least a low level signal;a refill line removably connectable to the inlet port of the first metallic container and to the outlet port of the second metallic container;a first valve in the refill line;an inert gas pressure source for communicating with the interior of the second metallic container;a control unit electrically communicating with the first level sensor, the second level sensor and the first valve, wherein the first valve is opened to allow the transfer of high purity chemicals to the first metallic container in response to the control unit receiving the low level signal from the first level sensor and the first valve is closed to terminate the transfer of high purity chemicals in response to the control unit receiving the high level signal from the first level sensor anda manifold, comprising:a carrier gas line for providing inert gas from the inert gas pressure source to the second metallic container;a second valve disposed within the refill line, wherein the second valve can be closed to isolate the outlet port of the second metallic container from a portion of the refill line;a third valve disposed within the carrier gas line, wherein the third valve can be closed to isolate the inert gas pressure source from the inlet port of the second metallic container;means for connecting a vacuum source to the carrier gas line; andmeans for bypassing the inert gas pressure source and the vacuum source to at least a portion of said refill line that was not isolated by said second valve.