초록 ▼

The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a check valve and filter assembly for supplying a clean, dry gaseous working fluid to maintain low level

The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a check valve and filter assembly for supplying a clean, dry gaseous working fluid to maintain low levels of moisture, oxygen, and particulate content around materials contained in the SMIF pod. The SMIF pod outlet port, which also includes a check valve and filter assembly, is connected with an evacuation system. Flow of purge gas inside the SMIF pod can be directed with one or more nozzle towers to encourage laminar flow inside the pod, and one or more outlet towers, having a function similar to that of the inlet tower, may also be provided. The purge gas can be dried by exposure to a desiccant, heated to temperatures between about 100.degree. C. and about 120.degree. C., and can be tested for baseline constituent levels prior to or after introduction into a SMIF pod. Multiple SMIF pods can also be purged by a single contamination control base unit.

대표청구항 ▼

[ What is claimed is:] [1.] A system for purging an environment for semiconductor manufacturing materials, to desired levels of relative humidity, oxygen and particulates, comprising:a modular isolation capsule having a housing defining a chamber for semiconductor manufacturing materials, said housi

[ What is claimed is:] [1.] A system for purging an environment for semiconductor manufacturing materials, to desired levels of relative humidity, oxygen and particulates, comprising:a modular isolation capsule having a housing defining a chamber for semiconductor manufacturing materials, said housing including a base;an inlet tower disposed in said base for admitting a gaseous working fluid to said modular isolation capsule for purging said modulation isolation chamber with said gaseous working fluid, said inlet tower including a check valve and filter assembly for permitting one-way flow of said gaseous working fluid into said modular isolation capsule and for filtering said gaseous working fluid being admitted to said modular isolation capsule;an outlet port disposed in said base for removing said gaseous working fluid from said modular isolation capsule, said outlet port including a check valve assembly for permitting one-way flow of said gaseous working fluid being removed from said modular isolation capsule;a source of gaseous working fluid for purging said modular isolation capsule; anda molecular contamination control base assembly having a gaseous working fluid supply port connected in fluid communication with said source of gaseous working fluid, said base assembly gaseous working fluid supply port being adapted to mate in sealed fluid communication with said modular isolation capsule inlet tower, and said molecular contamination control base assembly having a base assembly exhaust port adapted to mate in sealed fluid communication with said modular isolation capsule outlet port.