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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Molecular contamination control system

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B65B-001/04    B65D-085/30    C23C-016/00   
미국특허분류(USC) 118/715 ; 206/710 ; 206/711 ; 206/454 ; 414/217 ; 414/291 ; 414/935 ; 141/098 ; 141/085 ; 141/383
출원번호 US-0713396 (1996-09-13)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Fulwider Patton Lee & Utecht, LLP
인용정보 피인용 횟수 : 58  인용 특허 : 24
초록
▼

The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including a check valve and filter assembly for supplying a clean, dry gaseous working fluid to maintain low levels of moisture, oxygen, and particulate content around materials contained in the SMIF pod. The SMIF pod outlet port, which also includes a check valve and filter assembly, is connected with an evacuation system. Flow of purge gas inside the SMIF pod can be dir...

대표
청구항
▼

[ What is claimed is:] [1.] A system for purging an environment for semiconductor manufacturing materials, to desired levels of relative humidity, oxygen and particulates, comprising:a modular isolation capsule having a housing defining a chamber for semiconductor manufacturing materials, said housing including a base;an inlet tower disposed in said base for admitting a gaseous working fluid to said modular isolation capsule for purging said modulation isolation chamber with said gaseous working fluid, said inlet tower including a check valve and filter ...

이 특허에 인용된 특허 (24)

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