초록 ▼

where ns and na are the refractive indices of the low-refractive index layer and the high-refractive index layer for light components falling with the wavelength range from 190 nm to 250 nm, di (unit: nm) is the optical film thickness of the i-th layer when the high- and low-refractive index layers

where ns and na are the refractive indices of the low-refractive index layer and the high-refractive index layer for light components falling with the wavelength range from 190 nm to 250 nm, di (unit: nm) is the optical film thickness of the i-th layer when the high- and low-refractive index layers are counted from the substrate side to the air side, and .lambda.0 (nm) is the reference wavelength within the wavelength range from 190 nm to 250 nm.

대표청구항 ▼

[ What is claimed is:] [1.] An anti-reflection film arranged by alternately stacking a plurality of high-refractive index layers containing Al.sub.2 O.sub.3 and a plurality of low-refractive index layers containing SiO.sub.2 on a transparent substrate in turn from the substrate side to an air side,

[ What is claimed is:] [1.] An anti-reflection film arranged by alternately stacking a plurality of high-refractive index layers containing Al.sub.2 O.sub.3 and a plurality of low-refractive index layers containing SiO.sub.2 on a transparent substrate in turn from the substrate side to an air side, and satisfying:1.45.ltoreq.ns.ltoreq.1.651.60.ltoreq.na.ltoreq.1.850.31.lambda.0.ltoreq.d1.ltoreq.0.42.lambda.00.38.lambda.0.ltoreq.d2.ltoreq.0.45.lambda.00.20.lambda.0.ltoreq.d3.ltoreq.0.31.lambda.00.18.lambda.0.ltoreq.d4.ltoreq.0.28.lambda.00.20.lambda.0.ltoreq.d5.ltoreq.0.30.lambda.00.20.lambda.0.ltoreq.d6.ltoreq.0.30.lambda.0 re ns and na are the refractive indices of the low-refractive index layer and the high-refractive index layer for light components falling with a wavelength range from 190 nm to 250 nm, di (unit: nm) is the optical film thickness of the i-th layer when the high- and low-refractive index layers are counted from the substrate side to the air side, and .lambda.0 (nm) is the reference wavelength within the wavelength range from 190 nm to 250 nm.