초록 ▼

The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least one of which has a cooling unit, a frame for

The present invention provides a processing apparatus for eliminating pores in via holes of a silicon semiconductor. The apparatus includes a high-pressure vessel divided into at least two vessel component members in the axial direction thereof, at least one of which has a cooling unit, a frame for holding a load acting in the axial direction of the high-pressure vessel in processing a workpiece to be processed in the high-pressure vessel, an actuator for moving the vessel component members of the high-pressure vessel in the axial direction thereof so as to load and unload the workpiece, a sealing unit fitted to a portion for loading and unloading the workpiece, which is formed when the vessel component members are moved in the axial direction of the vessel, and a retractable cotter unit for transmitting a load acting in the axial direction of the high-pressure vessel to the frame.

대표청구항 ▼

[ What is claimed is:] [1.] A high-temperature high-pressure gas processing apparatus for processing a workpiece to be processed by heating in a high-pressure gas atmosphere in a high-pressure vessel having a heater, comprising:the high-pressure vessel divided into at least two vessel component memb

[ What is claimed is:] [1.] A high-temperature high-pressure gas processing apparatus for processing a workpiece to be processed by heating in a high-pressure gas atmosphere in a high-pressure vessel having a heater, comprising:the high-pressure vessel divided into at least two vessel component members in an axial direction thereof, at least one of which has cooling means;a frame for holding a load acting in the axial direction of the high-pressure vessel in processing the workpiece in the high-pressure vessel;an actuator for moving the vessel component members of the high-pressure vessel in the axial direction thereof so as to loading or unloading the workpiece;sealing means fitted to a portion for loading and unloading the workpiece, which is formed when the vessel component members are moved in the axial direction of the high-pressure vessel, said sealing means including a retainer ring forming a sealing surface and having a first axial seal at the sealing surface and a second radial seal; anda retractable cotter member for transmitting the load acting in the axial direction of the high-pressure vessel to the frame.