초록

A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber

대표청구항 ▼

[ I claim:] [1.] A substrate transfer device comprising:a drive section having a housing, an electro-magnetic stator, and a drive shaft, the stator being stationarily connected to the housing and the drive shaft having a set of permanent magnets directly stationarily connected thereto, the stator be

[ I claim:] [1.] A substrate transfer device comprising:a drive section having a housing, an electro-magnetic stator, and a drive shaft, the stator being stationarily connected to the housing and the drive shaft having a set of permanent magnets directly stationarily connected thereto, the stator being aligned with the magnets;an arm connected to the drive shaft; anda substrate supporting end effector connected to the arm;wherein the stator directly rotatably drives the drive shaft relative to the housing because of the direct stationary connection of the stator to the housing and the direct stationary connection of the permanent magnets to the drive shaft, and wherein the housing forms a vacuum chamber area with the permanent magnets being located inside of the vacuum chamber area and the stator being located outside of the vacuum chamber area.