초록 ▼

An electrochemical sensor is provided on a substrate whereby a precious metal layer is arranged in an inner region under an electrolyte layer that is surrounded by a polyimide structure. A hydrophobic layer is surrounded by an outer polyimide structure and further is located on top of the electrolyt

An electrochemical sensor is provided on a substrate whereby a precious metal layer is arranged in an inner region under an electrolyte layer that is surrounded by a polyimide structure. A hydrophobic layer is surrounded by an outer polyimide structure and further is located on top of the electrolyte layer and extends laterally beyond the electrolyte layer. A lead for electrical connection of the precious metal layer extends under the hydrophobic layer laterally from the electrolyte layer is sealed from the hydrophobic layer by a protective layer. The protective layer prevents the penetration of analysis fluid into the gap between the hydrophobic layer and the surrounding polyimide structure into the inner region of the sensor. The material of the protective layer is preferably a double layer of PECVD oxide and PECVD nitride.

대표청구항 ▼

[ We claim:] [1.] An electrochemical sensor comprising:at least one electrode fabricated from a precious metal disposed on top of a substrate,an electrolyte layer being disposed on top of at least a portion of the electrode, the electrolyte layer being surrounded by a first polymer structure,the fir

[ We claim:] [1.] An electrochemical sensor comprising:at least one electrode fabricated from a precious metal disposed on top of a substrate,an electrolyte layer being disposed on top of at least a portion of the electrode, the electrolyte layer being surrounded by a first polymer structure,the first polymer structure further surrounding an electrochemically sensitive region of the substrate,a hydrophobic layer being disposed on top of the electrolyte layer and the first polymer structure and extending laterally beyond the first polymer structure and the electrolyte layer, the hydrophobic layer being surrounded by a second polymer structure and engaged by the second polymer structure at an outer periphery of the hydrophobic layer,a further portion of the electrode extending laterally beyond the electrolyte layer and the first polymer structure and between the substrate and the hydrophobic layer and further between the second polymer structure and the substrate,a protective layer being disposed between the further portion of the electrode and the hydrophobic layer, between the further portion of the electrode and the second polymer structure, and between the further portion of the electrode and the periphery of the hydrophobic layer where the second polymer structure engages the hydrophobic layer.