초록 ▼

Pressure sensors that are fabricated to sense low pressures are tested and calibrated by providing a controlled gas flow or leak to create a pressure during testing. Rather than placing the pressure sensor in a sealed environment, a controlled leak of a gas is used to induce a stable and controllabl

Pressure sensors that are fabricated to sense low pressures are tested and calibrated by providing a controlled gas flow or leak to create a pressure during testing. Rather than placing the pressure sensor in a sealed environment, a controlled leak of a gas is used to induce a stable and controllable pressure region over the pressure sensor during testing. The stable low pressure region is monitored via a sensing tube.

대표청구항 ▼

[ What is claimed is:] [1.] A method of testing a sensor, comprising the steps of:providing the sensor;providing a flow of a gas in a chamber to create a pressure, the chamber having a controlled leak during testing of the sensor, wherein the leak is controlled by placing a fixture over the sensor w

[ What is claimed is:] [1.] A method of testing a sensor, comprising the steps of:providing the sensor;providing a flow of a gas in a chamber to create a pressure, the chamber having a controlled leak during testing of the sensor, wherein the leak is controlled by placing a fixture over the sensor with a gap between the fixture and the sensor;obtaining a desired pressure by adjusting a size of the gap between the fixture and the sensor;supplying the pressure to the sensor;measuring the pressure; andmeasuring an electrical output of the sensor.