초록 ▼

An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and aver

An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.

대표청구항 ▼

[ We claim:] [1.] An apparatus for monitoring the electrical power input to a load, comprisinga power transducer coupled to the load for monitoring the electrical power input to the load and generating a transducer output signal representative of the instantaneous electrical power input to the load,

[ We claim:] [1.] An apparatus for monitoring the electrical power input to a load, comprisinga power transducer coupled to the load for monitoring the electrical power input to the load and generating a transducer output signal representative of the instantaneous electrical power input to the load,a low pass filter coupled to the power transducer for filtering the transducer output signal and producing a low pass filter output signal representative of a short term average electrical power input to the load,a maximum signal detector coupled to the low pass filter for detecting the maximum signal level on the low pass filter output signal,a minimum signal detector coupled to the low pass filter for detecting the minimum signal level on the low pass filter output signal,a level sensor coupled to the maximum signal detector and the minimum signal detector for subtracting the minimum detected signal level from the maximum detected signal level and producing a level sensor output signal.