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Chlorosilane and hydrogen reactor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01J-019/02
  • C04B-035/52
출원번호 US-0891132 (1992-06-01)
발명자 / 주소
  • Burgie Richard Anthony
  • Fleming Eric Michael,CAX
출원인 / 주소
  • Hemlock Semiconductor Corporation
대리인 / 주소
    Boley
인용정보 피인용 횟수 : 40  인용 특허 : 11

초록 ▼

The present invention is a reactor for the hydrogenation of chlorosilanes at temperatures above about 600.degree. C. The reactor comprises one or more of the following improvements: (1) a reaction chamber formed from a silicon carbide coated carbon fiber composite, (2) a heating element formed from

대표청구항

[ We claim:] [1.] A reactor comprising: a reaction vessel defining a chamber for contacting chlorosilane and hydrogen gases at temperatures greater than about 600.degree. C., where the reaction vessel is formed from a silicon carbide coated carbon fiber composite.

이 특허에 인용된 특허 (11)

  1. Levin Harry (19831 Friar St. Woodland Hills CA 91367), Apparatus for making molten silicon.
    상세보기
  2. Endou Morinobu (Nagano JPX) Ueno Susumu (Ibaraki JPX) Hongu Tatsuhiko (Kanagawa JPX) Takamizawa Minoru (Tokyo JPX), Carbon fibers having improved surface properties and a method for the preparation thereof.
    상세보기
  3. Witter David E. (Richardson TX) Bawa Mohendra S. (Plano TX), Deposition of silicon at temperatures above its melting point.
    상세보기
  4. Bailey John M. (Dunlap IL) Towe Carey A. (Peoria IL) Shafer Scott F. (Peoria IL) Blanco Michael M. (Peoria IL), Encapsulated heating filament for glow plug.
    상세보기
  5. Galasso Francis S. (Manchester CT) Veltri Richard D. (East Hartford CT), Gas turbine composite parts.
    상세보기
  6. Burgie Richard A. (Midland MI), Graphite and carbon felt insulating system for chlorosilane and hydrogen reactor.
    상세보기
  7. Endou, Morinobu; Takamizawa, Minoru; Hongu, Tatsuhiko; Kobayashi, Taishi, Method for providing a coating layer of silicon carbide on substrate surface.
    상세보기
  8. Watanabe Masakazu (Aichi JPX) Okuno Akiyasu (Aichi JPX) Nozaki Shunkichi (Aichi JPX) Matsuo Yasushi (Aichi JPX) Fukuura Isamu (Aichi JPX), Process for producing silicon carbide heating elements.
    상세보기
  9. Rodgers Michael A. (Tempe AZ), Process for production of polycrystalline silicon.
    상세보기
  10. Weigert Wolfgang (Offenbach DEX) Meyer-Simon Eugen (Frankfurt DEX) Schwarz Rudolf (Wasserlos DEX), Process for the production of chlorosilanes.
    상세보기
  11. Galasso Francis S. (Manchester CT) Veltri Richard D. (East Hartford CT), Silicon carbide coated carbon fibers and composites.
    상세보기

이 특허를 인용한 특허 (40)

  1. Saiki, Wataru; Mizushima, Kazuki; Urushihara, Makoto, Apparatus and method for manufacturing trichlorosilane and method for manufacturing polycrystalline silicon.
    상세보기
  2. Saiki, Wataru; Akbay, Taner, Apparatus and method for producing trichlorosilane.
    상세보기
  3. Fahrenbruck, Scott; Hazeltine, Bruce; Schweyen, Andrew; Skinner, Shawn, Apparatus and methods for conversion of silicon tetrachloride to trichlorosilane.
    상세보기
  4. Ishii, Toshiyuki, Apparatus for producing trichlorosilane.
    상세보기
  5. Ishii, Toshiyuki; Ito, Hideo; Shimizu, Yuji, Apparatus for producing trichlorosilane.
    상세보기
  6. Ishii, Toshiyuki; Ito, Hideo; Shimizu, Yuji, Apparatus for producing trichlorosilane.
    상세보기
  7. Miyake, Masami; Murakami, Naoya, Apparatus for producing trichlorosilane.
    상세보기
  8. Mizushima, Kazuki; Saiki, Wataru; Murakami, Naoya; Miyake, Masami, Apparatus for producing trichlorosilane.
    상세보기
  9. Narukawa, Mitsutoshi; Shimizu, Yuji, Apparatus for producing trichlorosilane.
    상세보기
  10. Miyake, Masami; Saiki, Wataru, Apparatus for producing trichlorosilane and method for producing trichlorosilane.
    상세보기
  11. Murakami, Naoya; Saiki, Wataru, Apparatus for producing trichlorosilane and method for producing trichlorosilane.
    상세보기
  12. Raboin, Jean-Christophe; Bories, Marc; Echard, Michaël; Lesage, Romain; Rezgui, Lassad, Ceramic orifice chamber for fluid catalytic cracking unit.
    상세보기
  13. Quantrille, Thomas E.; Rogers, William M., Composite materials and devices comprising single crystal silicon carbide heated by electromagnetic radiation.
    상세보기
  14. Quantrille, Thomas E.; Rogers, William M., Composite materials and devices comprising single crystal silicon carbide heated by electromagnetic radiation.
    상세보기
  15. Raboin, Jean-Christophe, Element for ejecting gas into a regenerator of a fluid catalytic cracking unit.
    상세보기
  16. Hillabrand, David; Knapp, Theodore, Manufacturing apparatus for depositing a material and an electrode for use therein.
    상세보기
  17. Hillabrand, David; Knapp, Theodore, Manufacturing apparatus for depositing a material and an electrode for use therein.
    상세보기
  18. Ohta, Yusuke; Inada, Takashi; Mishiro, Makoto; Inada, Takashi; Nishikawa, Yasushi, Method for improving the flatness of graphite film, graphite film, and method for producing same.
    상세보기
  19. K?nig, Theo; Pfaffelhuber, Matthias; Herold, Heiko; Holdenried, G?nter; Mleczko, Leslaw, Method for producing highly-pure granular silicon.
    상세보기
  20. Ishii, Toshiyuki; Ito, Hideo; Shimizu, Yuji, Method for producing trichlorosilane.
    상세보기
  21. Saiki, Wataru; Mizushima, Kazuki, Method for producing trichlorosilane and method for utilizing trichlorosilane.
    상세보기
  22. Werner, Brad Jason, Method of repairing and/or protecting a surface in a reactor.
    상세보기
  23. Pazzaglia, Gianluca; Fumagalli, Matteo; Bovo, Rodolfo, Methods for reacting compounds.
    상세보기
  24. Hazeltine, Bruce, Monolithic heat exchanger and apparatus and methods for hydrogenation of a halosilane.
    상세보기
  25. Paetzold,Uwe; Reisbeck,Anton; Surner,Manfred, Process and apparatus for the hydrogenation of chlorosilanes.
    상세보기
  26. Knoth, Jens Felix; Eberle, Hans-Juergen; Ruedinger, Christoph, Process for converting silicon tetrachloride to trichlorosilane.
    상세보기
  27. Kendig,James Edward; Landis,David Russell; McQuiston,Todd Michael; Zalar,Michael Matthew, Process for preparation of polycrystalline silicon.
    상세보기
  28. Angier,Derek J.; Rhodes,James F.; Rogers,William M., Process for producing silicon carbide fibers essentially devoid of whiskers.
    상세보기
  29. Pazzaglia, Gianluca; Fumagalli, Matteo; Bovo, Rodolfo, Reactor apparatus and methods for reacting compounds.
    상세보기
  30. Angier,Derek J.; Rhodes,James F.; Rogers,William M., Silicon carbide fibers essentially devoid of whiskers and products made therefrom.
    상세보기
  31. Perkins, Christopher; Jovanovic, Zoran; Strand, Steven; Hilton, Courtland; Kelley, Donna, Systems and methods for an indirect radiation driven gasifier reactor and receiver configuration.
    상세보기
  32. Perkins, Christopher; Jovanovic, Zoran; Hilton, Courtland; Simmons, Wayne; Minden, Andrew, Systems and methods for an integrated solar driven chemical plant.
    상세보기
  33. Perkins, Christopher; Jovanovic, Zoran; Strand, Steven; Kelley, Donna; Minden, Andrew; Ridley, Richard, Systems and methods for biomass gasifier reactor and receiver configuration.
    상세보기
  34. Jovanovic, Zoran; Schramm, Bryan; Perkins, Christopher; Hilton, Courtland; Simmons, Wayne, Systems and methods for biomass grinding and feeding.
    상세보기
  35. Hilton, Courtland; Jovanovic, Zoran; Schramm, Bryan; Perkins, Christopher; Simmons, Wayne, Systems and methods for quenching, gas clean up, and ash removal.
    상세보기
  36. Simmons, Wayne; Perkins, Christopher; Jovanovic, Zoran, Systems and methods for solar-thermal gasification of biomass.
    상세보기
  37. Fahrenbruck, Scott; Hazeltine, Bruce, Systems and methods of producing trichlorosilane.
    상세보기
  38. Raboin, Jean-Christophe, Termination device of a reactor of a fluid catalytic cracking unit.
    상세보기
  39. Perkins, Christopher; Jovanovic, Zoran; Laska, Timothy E., Various methods and apparatuses for a radiant-heat driven chemical reactor.
    상세보기
  40. Simmons, Wayne W.; White, Sidney P.; Perkins, Christopher, Various methods and apparatuses for multi-stage synthesis gas generation.
    상세보기

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