초록 ▼

The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure

The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

대표청구항 ▼

[ I claim:] [1.] A process for fabricating a microspectrometer in a silicon substrate comprising the steps of:forming a detector with the silicon substrate;forming a lower mirror over the silicon substrate;forming a sacrificial layer over the lower mirror;depositing a bridge structure over the sacri

[ I claim:] [1.] A process for fabricating a microspectrometer in a silicon substrate comprising the steps of:forming a detector with the silicon substrate;forming a lower mirror over the silicon substrate;forming a sacrificial layer over the lower mirror;depositing a bridge structure over the sacrificial layer and the lower mirror, the bridge structure including a diaphragm supported relative to the silicon substrate with a plurality of springs and an upper mirror positioned over the lower mirror, the upper mirror having a plurality of silicon layers separated by a second layer having a lower index of refraction than the silicon layers;selectively removing at least a portion of the sacrificial layer from underneath the bridge structure such that a gap is provided between a lower surface of the bridge and the lower mirror, the upper mirror of the bridge structure being optically transmissive to incident radiation over a given spectral range such that the detector generates an electrical signal correlated with the intensity of radiation incident upon the detector within the spectral range; andoptically coupling a fluid chamber to the gap of the microspectrometer that measures an optical property of a fluid within the chamber.