초록 ▼

Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a m

Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.

대표청구항 ▼

[ What is claimed is:] [1.] Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5), said apparatus comprising at least one displaceably disposed gripper (75), which can be displaced by means of a me

[ What is claimed is:] [1.] Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5), said apparatus comprising at least one displaceably disposed gripper (75), which can be displaced by means of a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate to the substrate support, wherein:said centering device comprises a cylindrical centering pin (157) and a positioning member (161) for displacing said centering pin toward the positioning device;said centering pin has a first diameter;the positioning device has a first surface (154) which points in the direction toward the substrate support;said at least one gripper comprises a plurality of grippers disposed on the positioning device and projecting beyond the first surface by a distance HG;said centering device further comprises a control pin which projects from said centering pin by a distance HZ which is greater than the distance HG; andsaid control pin has a second diameter less than the first diameter.