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Photolithographically produced flat panel display surface plate support structure 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-009/00
출원번호 US-0584813 (1996-01-11)
발명자 / 주소
  • Farnworth Warren M.
출원인 / 주소
  • Micron Technology, Inc.
대리인 / 주소
    Hale and Dorr LLP
인용정보 피인용 횟수 : 7  인용 특허 : 44

초록 ▼

Fabrication of support structures for use in field emitter displays through a photolithographic process that involves (1) depositing a photolithable material on a substrate, (2) etching the material to create column areas in the material, (3) filling the column areas with a support material, (4) pla

대표청구항 ▼

[ What is claimed is:] [1.] A process for the formation of FED support structures, the process comprising:forming a first material on a substrate in a single layer;forming openings in the first material to expose portions of the substrate;providing a second material in the openings and over the firs

이 특허에 인용된 특허 (44)

  1. Hush Glen F. (Boise ID), Active matrix field emission display having peripheral regulation of tip current.
    상세보기
  2. Epsztein Bernard (Sceaux FRX), An electron source of the field emission type.
    상세보기
  3. Allen Leslie J. (Swindon CA GB2) Cherian Gabe (Fremont CA) Diaz Stephen H. (Los Altos CA), Chip carrier mounting device.
    상세보기
  4. Gill ; Jr. Gerald L. (3502 E. Atlanta Ave. Phoenix AZ 85040), Counterbalanced polishing apparatus.
    상세보기
  5. Lee John K. (Boise ID) Casper Stephen L. (Boise ID) Lowrey Tyler A. (Boise ID), Current-regulated field emission cathodes for use in a flat panel display in which low-voltage row and column address si.
    상세보기
  6. Kumar Nalin (Austin TX) Xie Chenggang (Cedar Park TX), Diode structure flat panel display.
    상세보기
  7. Borel Michel (Le Touvet FRX) Boronat Jean-Francois (Grenoble FRX) Meyer Robert (St Nazaire les Eymes FRX) Rambaud Philippe (Claix FRX), Electron source with micropoint emissive cathodes and display means by cathodoluminescence excited by field emission usi.
    상세보기
  8. Shichao Ge (Santa Clara CA) Lam Victor (Saratoga CA), Electronic fluorescent display.
    상세보기
  9. Brodie Ivor (Palo Alto CA) Gernick Henry R. (Pleasanton CA) Holland Christopher E. (Redwood City CA) Moessner Helmut A. (Saratoga CA), Field emission cathode based flat panel display having polyimide spacers.
    상세보기
  10. Cathey David A. (Boise ID) Rolfson J. Brett (Boise ID) Lowrey Tyler A. (Boise ID) Doan Trung T. (Boise ID), Field emission structures produced on macro-grain polysilicon substrates.
    상세보기
  11. Cathey David A. (Boise ID) Rolfson J. Brett (Boise ID) Lowrey Tyler A. (Boise ID) Doan Trung T. (Boise ID), Field emission structures produced on macro-grain polysilicon substrates.
    상세보기
  12. Horne Remko (Eindhoven NLX) Van Andel Maarten A. (Eindhoven NLX) Van Veen Gerardus N. A. (Eindhoven NLX), Flat electron display device with spacer and method of making.
    상세보기
  13. Browning Jim J. (Boise ID), Flat panel display drive circuit with switched drive current.
    상세보기
  14. Heynisch, Hinrich, Flat viewing screen with spacers between support plates and method of producing same.
    상세보기
  15. Poley ; Neil Myron ; Skolnik ; Marvin Benjamin, Gas panel spacer technology.
    상세보기
  16. Georger ; Jr. Jacque H. (Marlboro MA) Peckerar Martin C. (Silver Spring MD) Rebbert Milton L. (Elkridge MD) Calvert Jeffrey M. (Alexandria VA) Hickman James J. (McLean VA), High aspect ratio metal microstructures and method for preparing the same.
    상세보기
  17. Wiemann David A. (Mesa AZ) Jaskie James E. (Scottsdale AZ) Summers John (Apache Junction AZ) Kane Robert C. (Woodstock IL), High-vacuum substrate enclosure.
    상세보기
  18. Xie Chenggang (415 Cripple Creek Rd. Cedar Park TX 78613) Kumar Nalin (12116 Scribe Dr. Austin TX 78727), Lateral field emitter device and method of manufacturing same.
    상세보기
  19. Cathey David A. (Boise ID), Low resistance electrodes useful in flat panel displays.
    상세보기
  20. Inada Koki (Chiba JPX) Tateyama Norihiro (Saitama JPX) Dobashi Osamu (Kanagawa JPX), Method for fabricating a cathode ray tube.
    상세보기
  21. Tjaden Kevin (Boise ID) Rolfson J. Brett (Boise ID), Method for formation of a trench accessible cold-cathode field emission device.
    상세보기
  22. Vasquez Barbara (Chandler AZ), Method for forming a field emission device.
    상세보기
  23. Cathey David A. (Boise ID) Tjaden Kevin (Boise ID), Method for forming a substantially uniform array of sharp tips.
    상세보기
  24. Chandross Edwin Arthur ; Jin Sungho ; Kochanski Gregory Peter ; Thomson ; Jr. John ; Zhu Wei, Method for making improved pillar structure for field emission devices.
    상세보기
  25. Brodie Ivor (Palo Alto CA) Gurnick Henry R. (Pleasanton CA) Holland Christopher E. (Redwood City CA) Moessner Helmut A. (Saratoga CA), Method for providing polyimide spacers in a field emission panel display.
    상세보기
  26. Reinberg Alan R. (Westport CT) Rhodes Howard E. (Boise ID), Method of creating sharp points and other features on the surface of a semiconductor substrate.
    상세보기
  27. Meyer Ralph L. (Elgin IL) Sobel Alan (Evanston IL), Method of making an insulator-support for luminescent display panels and the like.
    상세보기
  28. Horne Remko (Eindhoven NLX) Van Andel Maarten A. (Eindhoven NLX) Van Veen Gerardus N. A. (Eindhoven NLX), Method of making flat electron display device with spacer.
    상세보기
  29. Miyazaki Shigeki (Kanagawa JPX) Togawa Takahiro (Kanagawa JPX), Method of manufacturing a plasma addressed liquid crystal display device having planarized barrier ribs.
    상세보기
  30. Lowrey Tyler A. (Boise ID) Doan Trung T. (Boise ID) Cathey David A. (Boise ID) Rolfson J. Brett (Boise ID), Method to form high aspect ratio supports (spacers) for field emission display using micro-saw technology.
    상세보기
  31. Doan Trung T. (Boise ID) Lowrey Tyler A. (Boise ID) Cathey David A. (Boise ID) Rolfson J. Brett (Boise ID), Method to form self-aligned gate structures and focus rings.
    상세보기
  32. Doan Trung T. (Boise ID) Lowrey Tyler A. (Boise ID) Cathey David A. (Boise ID) Rolfson J. Brett (Boise ID), Method to form self-aligned gate structures and focus rings.
    상세보기
  33. Doan Trung T. (Boise ID) Rolfson J. Brett (Boise ID) Lowrey Tyler A. (Boise ID) Cathey David A. (Boise ID), Method to form self-aligned gate structures around cold cathode emitter tips using chemical mechanical polishing technol.
    상세보기
  34. Sandhu Gurtej S. (Boise ID), Method to form self-aligned tips for flat panel displays.
    상세보기
  35. Yates Colin K. (Sturbridge MA), Microchannel plates.
    상세보기
  36. Gill ; Jr. Gerald L. (Scottsdale AZ) Rioux Philip J. (Glendale AZ), Polishing apparatus.
    상세보기
  37. Cathey David A. (Boise ID), Process for isotropically etching semiconductor devices.
    상세보기
  38. Schulman Ronald (Chicago IL), Process of manufacturing a fiber bundle.
    상세보기
  39. Gray Henry F. (Alexandria VA), Regulatable field emitter device and method of production thereof.
    상세보기
  40. Rolfson J. Brett (Boise ID) Cathey David A. (Boise ID), Removable bandpass filter for microlithographic aligners.
    상세보기
  41. Taylor Robert H. (Richardson TX) Levine Jules D. (Dallas TX), Spacer for flat panel display.
    상세보기
  42. Cathey David A. (Boise IA) Yu Chris C. (Boise IA) Doan Trung T. (Boise IA) Lowrey Tyler A. (Boise IA) Rolfson J. Brett (Boise IA), Spacers for field emission display fabricated via self-aligned high energy ablation.
    상세보기
  43. Cathey David A. (Boise ID) Hofmann James J. (Boise ID) Dynka Danny (Boise ID) Stansbury Darryl M. (Boise ID), Spacers for large area displays.
    상세보기
  44. Ge Shichao (Santa Clara CA) Lam Victor (Saratoga CA), Super high resolution cold cathode fluorescent display.
    상세보기

이 특허를 인용한 특허 (7)

  1. Hoffman, James J.; Elledge, Jason B.; Xia, Zhong-Yi; Cathey, David A., Anodically bonded elements for flat-panel displays.
    상세보기
  2. Hofmann, James J.; Elledge, Jason B.; Xia, Zhong-Yi; Cathey, David A., Anodically bonded elements for flat-panel displays.
    상세보기
  3. Hofmann,James J.; Elledge,Jason B., Anodically-bonded elements for flat panel displays.
    상세보기
  4. Hofmann, James J.; Elledge, Jason B., Method of anodically bonding elements for flat panel displays.
    상세보기
  5. Hirano,Shinji, Method of manufacturing display device having columnar spacers.
    상세보기
  6. Hopple, George B.; Barton, Roger W.; Porter, John D.; Fahlen, Theodore S.; Mackey, Bob L., Method of patterning wall and phosphor well matrix utilizing glass.
    상세보기
  7. Hopple,George B.; Barton,Roger W.; Porter,John D.; Fahlen,Theodore S.; Mackey,Bob L., Method of patterning wall and phosphor well matrix utilizing glass.
    상세보기

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