초록

A single reflector, two-axis MEMS scanner made of a substrate. The substrate has nested, cut-out regions. Each region is independently rotatable about one of the axes. The axes of the regions are substantially orthogonal.

대표청구항 ▼

[ I claim:] [5.] A two-axis gimbal comprising a planar microelectromechanical ("MEMs") film substrate, the film substrate including a first cut-out region rotatably connected to an outer region of the film substrate in a manner to permit controlled free out-of-plane rotation of the first region rela

[ I claim:] [5.] A two-axis gimbal comprising a planar microelectromechanical ("MEMs") film substrate, the film substrate including a first cut-out region rotatably connected to an outer region of the film substrate in a manner to permit controlled free out-of-plane rotation of the first region relative to the outer region, and a second cut-out region rotatably connected to and nested within the first cut-out region in a manner to permit controlled free out-of-plane rotation of the second region relative to the first region, wherein the second cut-out region carries a reflector, and wherein the axis of rotation of the first cut-out region is oriented substantially 90 degrees with respect to the axis of rotation of the second cut-out region, and wherein the cut-out regions are rotated by applying an independent rotational force to each respective cut-out region.