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Semiconductor die having sacrificial bond pads for die test 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/60
  • H01L-021/66
출원번호 US-0837618 (1997-04-21)
발명자 / 주소
  • Chia Chok J.
  • Low Qwai H.
  • Alagaratnam Maniam
출원인 / 주소
  • LSI Logic Corporation
인용정보 피인용 횟수 : 37  인용 특허 : 4

초록

The testing of integrated circuits in a plurality of dice arranged in rows and columns in a semiconductor wafer is facilitated by effectively increasing the pitch between adjacent input/output bonding pads on each die by providing a plurality of test pads in scribing space between adjacent die. Alte

대표청구항

[ What is claimed is:] [1.] A semiconductor wafer comprising:a plurality of integrated circuit dice arranged in rows and columns separated by scribing space for scribing and breaking the wafer, each die having a plurality of bonding pads positioned along the periphery of the die as input/output cont

이 특허에 인용된 특허 (4)

  1. Axer Klaus (Lubeck DEX), Integrated test circuits having pads provided along scribe lines.
  2. Vokoun ; III Edward R. (Tijeras NM), Semiconductor wafer.
  3. Smears Nicholas William (Saint Egreve FRX), Structure for testing integrated circuits.
  4. Smith William H. (Poway CA) Chen Chau-Shiong (San Diego CA), Wafer-level burn-in testing of integrated circuits.

이 특허를 인용한 특허 (37)

  1. Patel Sunil A. ; Chia Chok J. ; Desai Kishor V., Apparatus and method for improving ball joints in semiconductor packages.
  2. Pagani, Alberto, Circuit architecture for the parallel supplying during electric or electromagnetic testing of a plurality of electronic devices integrated on a semiconductor wafer.
  3. Lin, Paul T., Design of interconnection pads with separated probing and wire bonding regions.
  4. Lunde,Aron T., Die assembly and method for forming a die on a wafer.
  5. Tsai, Chia-Lun; Chien, Wen-Cheng; Lee, Po-Han; Chen, Wei-Ming, Electronic device package and fabrication method thereof.
  6. Pagani, Alberto, Electronic devices with extended metallization layer on a passivation layer.
  7. Pao-Ho Yuan TW; Ting-Ke Chai TW; Lien-Chi Chan TW; Jen-Yi Tsai TW, Flip-chip bumping structure with dedicated test pads on semiconductor chip and method of fabricating the same.
  8. Cave Nigel G. ; Yu Kathleen C. ; Farkas Janos, Integrated circuit having a support structure.
  9. Paul Davis Bell, Integrated circuit having wirebond pads suitable for probing.
  10. David E. Sloman, Kerf contact to silicon redesign for defect isolation and analysis.
  11. Devereaux, Kevin M., Method and apparatus for wafer level testing of semiconductor using sacrificial on die power and ground metalization.
  12. H?bner, Michael, Method for rewiring pads in a wafer-level package.
  13. Roberts, Jr., Howard, Method for testing semiconductor wafers using temporary sacrificial bond pads.
  14. Devereaux, Kevin M., Method for wafer level testing of semiconductor using sacrificial on die power and ground metalization.
  15. Pagani, Alberto, Method to perform electrical testing and assembly of electronic devices.
  16. Michimata, Shigetomi; Yanagisawa, Masayuki; Kuroyanagi, Kazumasa, Probe resistance measurement method and semiconductor device with pads for probe resistance measurement.
  17. Michimata, Shigetomi; Yanagisawa, Masayuki; Kuroyanagi, Kazumasa, Probe resistance measurement method and semiconductor device with pads for probe resistance measurement.
  18. Song Ho-Sung,KRX ; Lee Ki-Jong,KRX, Reduced size integrated circuits and methods using test pads located in scribe regions of integrated circuits wafers.
  19. Katz, Anne T., Reducing layer separation and cracking in semiconductor devices.
  20. Hata,William Y., Reticle for layout modification of wafer test structure areas.
  21. Hata, William Y., Reticle for wafer test structure areas.
  22. Wu, Ping-Chang, Scribe line structure and method for dicing a wafer.
  23. Kosugi, Ryuichi, Semiconductor chip and its manufacturing method.
  24. Mardi,Mohsen Hossein; Cho,Jae; Wu,Xin X.; Wu,Chih Chung; Liang,Shih Liang; Stokes,Sanjiv; Bazargan,Hassan K., Semiconductor component having test pads and method and apparatus for testing same.
  25. Umehara, Norito; Umeda, Yoshikatsu, Semiconductor device and method of manufacturing same.
  26. Eghan,Abu K.; Li,Richard C.; Wu,Xin X., Semiconductor die with high density offset-inline bond arrangement.
  27. Aiki,Kiyoshi; Hikone,Kazunori; Adachi,Hiroyuki; Okamoto,Masayoshi; Onose,Masao; Mizuno,Yuji, Semiconductor integrated circuit device.
  28. Corbett Tim J. ; Scholer Raymond P. ; Gonzalez Fernando, Semiconductor reliability test chip.
  29. Corbett Tim J. ; Scholer Raymond P. ; Gonzalez Fernando, Semiconductor reliability test chip.
  30. Corbett, Tim J.; Scholer, Raymond P.; Gonzalez, Fernando, Semiconductor reliability test chip.
  31. Corbett, Tim J.; Scholer, Raymond P.; Gonzalez, Fernando, Semiconductor reliability test chip.
  32. Kim Jae Woon,KRX ; Park Jong Hoon,KRX, Semiconductor wafer and fabrication method of a semiconductor chip.
  33. Kim, Jae Woon; Park, Jong Hoon, Semiconductor wafer and fabrication method of a semiconductor chip.
  34. Werner, Ertle; Goller, Bernd; Horn, Michael; Kothe, Bernd, Semiconductor wafer with electrically connected contact and test areas.
  35. Winter,Ramona; Lachenmann,Susanne; Rosskopf,Valentin; Sukman Praehofer,Sibina, Semiconductor wafer with test structure.
  36. Paul Davis Bell, Structure and method for probing wiring bond pads.
  37. Hata, William Y., Techniques for reticle layout to modify wafer test structure area.
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