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Method of manufacturing ball grid arrays for improved testability 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/44
출원번호 US-0970184 (1997-11-14)
발명자 / 주소
  • Slocum Alexander H.
출원인 / 주소
  • Kinetrix, Inc.
대리인 / 주소
    Walsh
인용정보 피인용 횟수 : 20  인용 특허 : 10

초록

A ball grid array package for integrated circuit chips that is designed to facilitate testing. The balls are planarized with high precision to make electrical contact more accurate for testing. Contact, even on fine pitched arrays, can be readily made. A machine for planarizing the solder balls is d

대표청구항

[ What is claimed is:] [1.] A method of manufacturing integrated circuit chips comprising the steps of:a) forming an integrated circuit package having a plurality of solder balls on one surface thereof; andb) cutting, on each of the plurality of solder balls, a flat portion on a surface thereof.

이 특허에 인용된 특허 (10)

  1. Tago Masamoto (Tokyo JPX) Tanaka Kei (Tokyo JPX), Method and apparatus for forming bump structure used for flip-chip mounting, the bump structure and the flip-chip.
  2. Adamjee Waseem (Austin TX), Method for ball bumping a semiconductor device.
  3. Akram Salman (Boise ID) Farnworth Warren M. (Nampa ID) Wood Alan G. (Boise ID), Method for fabricating a self limiting silicon based interconnect for testing bare semiconductor dice.
  4. Koopman Nicholas G. (Raleigh NC) Rinne Glenn A. (Cary NC) Turlik Iwona (Raleigh NC) Yung Edward K. (Carrboro NC), Method for testing, burn-in, and/or programming of integrated circuit chips.
  5. Nakamura Yoshifumi (Neyagawa JPX) Bessho Yoshihiro (Higashiosaka JPX) Yuhaku Satoru (Osaka JPX) Hakotani Yasuhiko (Nishinomiya JPX) Itagaki Minehiro (Moriguchi JPX) Miura Kazuhiro (Osaka JPX), Method of manufacturing a ceramic substrate.
  6. Kim Il U. (Seoul KRX), Method of manufacturing a known good die array.
  7. Dunaway Thomas J. (St. Louis Park MN) Spielberger Richard K. (Maple Grove MN) Dicks Lori A. (New Hope MN) Loy Jerald M. (Anoka MN), Method of manufacturing a leadframe having conductive elements preformed with solder bumps.
  8. Tanioka Michinobu (Tokyo JPX) Suzuki Motoji (Tokyo JPX), Method of producing a flip chip.
  9. Kawakita Tetuo,JPX ; Hatada Kenzo,JPX, Process for bonding a semiconductor to a circuit substrate including a solder bump transferring step.
  10. Wood Alan G. (Boise ID) Doan Trung T. (Boise ID) Farnworth Warren M. (Nampa ID) Corbett Tim J. (Boise ID), Process for forming a raised portion on a projecting contact for electrical testing of a semiconductor.

이 특허를 인용한 특허 (20)

  1. Akram, Salman; Ahmad, Syed Sajid, Collar positionable about a periphery of a contact pad and around a conductive structure secured to the contact pads, semiconductor device components including same, and methods for fabricating same.
  2. Akram, Salman; Ahmad, Syed Sajid, Collar positionable about a periphery of a contact pad and around a conductive structure secured to the contact pads, semiconductor device components including same, and methods for fabricating same.
  3. Akram, Salman; Ahmad, Syed Sajid, Collar positionable about a periphery of a contact pad and around a conductive structure secured to the contact pads, semiconductor device components including same, and methods for fabricating same.
  4. Akram,Salman; Ahmad,Syed Sajid, Collar positionable about a periphery of a contact pad and around a conductive structure secured to the contact pads, semiconductor device components including same, and methods for fabricating same.
  5. Akram,Salman; Ahmad,Syed Sajid, Collars, support structures, and forms for protruding conductive structures.
  6. St. Amand, Roger D., Column and stacking balls package fabrication method and structure.
  7. Yen-Ming Chen TW; Kuo-Wei Lin TW; Cheng-Yu Chu TW; Fu-Jier Fan TW; Yang-Tung Fan TW; Chiou-Shian Peng TW; Shih-Jane Lin TW, Method for bumping and backlapping a semiconductor wafer.
  8. Mizukoshi, Masataka; Ishizuki, Yoshikatsu; Nakagawa, Kanae; Okamoto, Keishiro; Teshirogi, Kazuo; Sakai, Taiji, Method for forming bumps, semiconductor device and method for manufacturing same, substrate processing apparatus, and semiconductor manufacturing apparatus.
  9. Herren, Peter, Method for machining workpieces and machine tool.
  10. Dreiza, Mahmoud; Ballantine, Andrew; Shumway, Russell Scott, Molded cavity substrate MEMS package fabrication method and structure.
  11. Lange, Bernhard P; Coyle, Anthony L; Holloway, Jeffrey G, Non-pull back pad package with an additional solder standoff.
  12. Kim, Jin Seong; Park, Dong Joo; Kim, Kwang Ho; Ahn, Ye Sul, Semiconductor device and fabricating method thereof.
  13. Kim, Jin Seong; Park, Dong Joo; Kim, Kwang Ho; Yoo, Hee Yeoul; Jeong, Jeong Wung, Semiconductor device having overlapped via apertures.
  14. Kim, Jin Seong; Park, Dong Joo; Kim, Kwang Ho; Yoo, Hee Yeoul; Jeong, Jeong Wung, Semiconductor device having overlapped via apertures.
  15. Kim, Jin Seong; Park, Dong Joo; Kim, Kwang Ho; Yoo, Hee Yeoul; Jeong, Jeong Wung, Semiconductor device having overlapped via apertures.
  16. Darveaux, Robert Francis; St. Amand, Roger D.; Perelman, Vladimir, Stackable package and method.
  17. Darveaux, Robert Francis; St. Amand, Roger D.; Perelman, Vladimir, Stackable package and method.
  18. Bancod, Ludovico E.; Kim, Jin Seong; Wachtler, Kurt Peter, Stackable plasma cleaned via package and method.
  19. Darveaux, Robert Francis; Bancod, Ludovico; Yoshida, Akito, Stackable treated via package and method.
  20. St. Amand, Roger D., Underfill contacting stacking balls package fabrication method and structure.
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