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An apparatus for manufacturing a chamber, the chamber including first and second glass substrates and an enclosure arranged between the substrates or an enclosure and at least one spacer arranged between the substrates. The apparatus includes a pair of heating plates, having heaters therein, for hol

An apparatus for manufacturing a chamber, the chamber including first and second glass substrates and an enclosure arranged between the substrates or an enclosure and at least one spacer arranged between the substrates. The apparatus includes a pair of heating plates, having heaters therein, for holding the glass substrates, a temperature controller for controlling the temperature of the heaters, a position alignment device for moving at least one of the pair of heating plates in X-, Y-, and .theta.-directions, a first driving device for driving the position alignment device, a second driving device for moving at least one of the pair of heating plates in a Z-direction, an image monitoring device for monitoring the positions of the first and second substrates, and a control device for supplying a command to one of the first and second driving devices on the basis of information supplied from the image monitoring device

대표청구항 ▼

[ What is claimed is:] [1.] An apparatus for manufacturing a chamber, the chamber constituted by first and second glass substrates and an enclosure arranged between said first and second substrates or an enclosure and at least one spacer arranged between said first and second substrates, comprising:

[ What is claimed is:] [1.] An apparatus for manufacturing a chamber, the chamber constituted by first and second glass substrates and an enclosure arranged between said first and second substrates or an enclosure and at least one spacer arranged between said first and second substrates, comprising:(a) a pair of heating plates which can respectively hold said first and second substrates and comprise heaters for heating said first and second substrates;(b) a temperature controller for controlling temperatures of the heaters;(c) position alignment means for moving at least one of said pair of heating plates in X-, Y-, and .theta.-directions;(d) first driving means for driving said position alignment means;(e) second driving means for moving at least one of said pair of heating plates in a Z-direction;(f) image monitoring means for monitoring positions of said first and second substrates; and(g) control means for supplying a command to one of said first and second driving means on the basis of information supplied from said image monitoring means.