초록 ▼

Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall o

Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall of the cavity, wherein the wall is transparent to laser light so as to allow a beam of laser light to strike the getter precursor and sputter same on the walls of the gettering chamber.

대표청구항 ▼

[ What is claimed is:] [1.] A gettering enclosure for a semiconductor device, comprising:a substrate;an enclosure hermetically sealed to the substrate, the enclosure comprising at least one wall and defining a cavity therein disposed to enclose a semiconductor device mounted to the substrate, at lea

[ What is claimed is:] [1.] A gettering enclosure for a semiconductor device, comprising:a substrate;an enclosure hermetically sealed to the substrate, the enclosure comprising at least one wall and defining a cavity therein disposed to enclose a semiconductor device mounted to the substrate, at least a portion of the wall comprising a material transparent to laser radiation;a getter precursor material secured to the wall, at least a portion of the getter precursor material spaced from the transparent material and disposed in relation to the transparent material to allow a beam of laser radiation to pass through the transparent material to strike the getter precursor material.