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특허 상세정보

Viscous fluid discharging apparatus for manufacturing semiconductors having a removable bubble capturing portion

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B67D-005/06   
미국특허분류(USC) 222/146.5 ; 222/189.06 ; 222/190 ; 222/527 ; 137/171 ; 96/155
출원번호 US-0644011 (1996-05-09)
우선권정보 KR-0009688 (1995-05-09)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Loudermilk & Associates
인용정보 피인용 횟수 : 14  인용 특허 : 3
초록

A viscous fluid discharging apparatus is provided for removing air bubbles introduced during the passing of the viscous fluid before being supplied to the substrate. A viscous fluid discharging apparatus according to the present invention includes a viscous fluid storing container, a viscous fluid supplying pump, a viscous fluid filter, and a viscous fluid discharging mechanism provided with a final air bubble filtering means. The fluid material discharging mechanism includes a connecting portion formed on an end of a temperature adjusting mechanism conn...

대표
청구항

[ What is claimed is:] [1.] An apparatus discharging a viscous fluid in a semiconductor manufacturing process, comprising:a fluid storage container holding said viscous fluid;a fluid supply pump, wherein the supply pump pumps the viscous fluid from the storage container;a fluid filter, wherein the fluid filter is coupled to the fluid supply pump and filters impurities and air bubbles contained in the viscous fluid; anda fluid discharging mechanism comprising a temperature adjusting mechanism, a connecting portion and a discharge gun, wherein the fluid di...

이 특허를 인용한 특허 피인용횟수: 14

  1. Arch,James J.. Bottom draining tank with disposable liner and method. USP2006016988639.
  2. Yuji Matsuyama JP. Filter unit and solution treatment unit. USP2002066402821.
  3. Gonda, Steve R.; Tsao, Yow-Min D.; Lee, Wenshan. Fluid bubble eliminator. USP2005036863712.
  4. Lumpkin, Wayne R.. Master cylinder lever for a bicycle hydraulic disc brake. USP2013068464845.
  5. Lumpkin,Wayne L. Master cylinder lever for a hydraulic disc brake having a backpack reservoir. USP2007027178646.
  6. Lumpkin, Wayne R. Master cylinder lever with independently variable rest position and engagement point. USP2009087575105.
  7. Lumpkin, Wayne R. Master cylinder lever with variable dead band and variable reach adjustment independent of the dead band adjustment. USP2011128074774.
  8. Lumpkin, Wayne R. Method and apparatus for adjusting a lever actuated hydraulic disc brake master cylinder. USP2009057530435.
  9. Lumpkin, Wayne R. Method of varying a rest position and a length of an actuation arc of a lever in a hydraulic disc brake system. USP2009117617913.
  10. Schmidt, Jeffrey A.. Orientation insensitive combined liquid reservoir and gas/liquid separator. USP2005096942718.
  11. Hisao Kamo JP. Solution feeding apparatus and method of feeding solution. USP2002016336959.
  12. Lee, Jung Min. Spout assembly for liquid container. USP2003066571995.
  13. Lumpkin, Wayne R. Symmetric master cylinder lever for a hydraulic disc brake. USP2009077559414.
  14. Vince L. Marinaro ; Ted Wakamiya ; Eric Kent. System and method for purging air bubbles from filters. USP2002016336960.