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A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassett

A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

대표청구항 ▼

[ We claim:] [2.] An apparatus for transferring a wafer cassette along a vertical axis between a SMIF pod and a platform of a wafer processing station, said platform moving substantially horizontally between a first position within a wafer processing station and a second position where the platform

[ We claim:] [2.] An apparatus for transferring a wafer cassette along a vertical axis between a SMIF pod and a platform of a wafer processing station, said platform moving substantially horizontally between a first position within a wafer processing station and a second position where the platform is extended from the wafer processing station, the SMIF pod including a pod top capable of mating with a pod door, the pod door supporting the wafer cassette, the apparatus comprising:a port plate including an opening, said port plate capable of being affixed adjacent the wafer processing station, and said port plate capable of supporting the pod top;means for translating said port plate along the vertical axis;a port door mounted within said opening capable of supporting said pod door; andgripping means, capable of moving along the vertical axis with said port plate, for gripping the wafer cassette.