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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

Aerosol surface processing

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B24C-007/00   
미국특허분류(USC) 451/089 ; 451/075 ; 451/039 ; 451/053
출원번호 US-0335329 (1994-11-07)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Fish & Richardson P.C.
인용정보 피인용 횟수 : 99  인용 특허 : 69
초록
▼

A scheme for removing foreign material from the surface of a substrate by directing a high velocity aerosol of at least partially frozen particles against the foreign material to be removed. Different schemes are described for accelerating the frozen particles to very high velocities sufficient for particle removal, removal of organic layers (e.g., hard baked photoresist or ion implanted photoresist) and removal of metallic layers. In one embodiment, liquid droplets are entrained in a high velocity gas flow and the resulting gas/liquid mixture is passed ...

대표
청구항
▼

[ What is claimed is:] [1.] An apparatus for removing foreign material from the surface of a substrate by directing a high velocity aerosol of at least partially frozen particles against the foreign material to be removed, said apparatus comprising:a chamber having a top and a bottom and being adapted to contain a cooled liquid under pressure as a result of evaporation of the liquid at the top of the chamber into a gas;a liquid flow channel having a proximal end, which extends into the chamber and terminates in the vicinity of the chamber bottom, and hav...

이 특허에 인용된 특허 (69)

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이 특허를 인용한 특허 피인용횟수: 99

  1. Xia Chang Feng. Aerosol assisted chemical cleaning method. USP2001036203623.
  2. Rose Peter H. ; Sferlazzo Piero ; van der Heide Robert G.. Aerosol surface processing. USP2001036203406.
  3. Uziel, Yoram. Air bearing-sealed micro-processing chamber. USP2004076764386.
  4. Deok-Joo Yoon KR; Myeon-Chang Sung KR; Kwang-Ho Jeong KR. Apparatus and method for dry cleaning of substrates using clusters. USP2002096449873.
  5. Fishkin, Boris; Sherrard, Michael. Apparatus for cleaning and drying substrates. USP2010057718011.
  6. Arpke, Robert C.. Apparatus for removing paint. USP2005086925730.
  7. Jackson,David P.. Apparatus to treat and inspect a substrate. USP2006117134946.
  8. Jackson,David P.. Carbon dioxide snow apparatus. USP2007117293570.
  9. Sonoda, Yuzuru; Yamanishi, Toshiyuki. Cleaning method and apparatus using fluid spraying. USP2004046726777.
  10. Sugawara, Eiichi; Moriya, Tsuyoshi. Cleaning method for turbo molecular pump. USP2011118062432.
  11. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108545857.
  12. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108563012.
  13. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108551506.
  14. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013128603494.
  15. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603495.
  16. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603496.
  17. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013108545806.
  18. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014058731842.
  19. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128613937.
  20. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014078788212.
  21. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069056047.
  22. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069050251.
  23. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2013108545856.
  24. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069060931.
  25. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2013048409376.
  26. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015079072799.
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  28. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058725420.
  29. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2013108545855.
  30. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069050070.
  31. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069060934.
  32. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058722068.
  33. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015079072688.
  34. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015069050317.
  35. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014058731840.
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  37. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014078793075.
  38. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014058731841.
  39. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2013108551505.
  40. Eliasson, Bertil; Hallberg, Per-Åke; Carlsson, Lennart; Engman, Fredrik. Device and use in connection with measure for combating. USP2005116966144.
  41. Endisch, Denis H.. Edge bead removal for spin-on materials containing low volatility solvents fusing carbon dioxide cleaning. USP2003056565920.
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  43. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and array devices thereof. USP2014078784384.
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