초록 ▼

An apparatus for applying material by cathodic arc deposition to a substrate is provided which includes a vessel, means for maintaining a vacuum in the vessel, a cathode, a contactor, means for selectively sustaining an arc of electrical energy between the cathode and an anode, and an actuator. The

An apparatus for applying material by cathodic arc deposition to a substrate is provided which includes a vessel, means for maintaining a vacuum in the vessel, a cathode, a contactor, means for selectively sustaining an arc of electrical energy between the cathode and an anode, and an actuator. The cathode and contactor are positioned inside the vessel, and the contactor is electrically connected to the means for selectively sustaining an arc of electrical energy. The actuator selectively actuates the contactor into electrical contact with the cathode, and thereby electrically connects the cathode to the means for sustaining an arc of electrical energy.

대표청구항 ▼

[ We claim:] [1.] An apparatus for applying material by cathodic arc vapor deposition to a plurality of substrates, comprising:a vessel;means for maintaining a vacuum in said vessel;a disk-shaped cathode positioned inside said vessel, said cathode having a first end surface, a second end surface, an

[ We claim:] [1.] An apparatus for applying material by cathodic arc vapor deposition to a plurality of substrates, comprising:a vessel;means for maintaining a vacuum in said vessel;a disk-shaped cathode positioned inside said vessel, said cathode having a first end surface, a second end surface, and an evaporative surface extending between said end surfaces;means for selectively sustaining an arc of electrical energy between said cathode and an anode; anda selectively actuable contactor positioned inside said vessel, said contactor including cooling means, wherein said contactor is selectively actuated into contact with one of said end surfaces of said cathode, thereby providing indirect cooling of said cathode, and wherein said contactor provides an electrical connection between said means for selectively sustaining an arc of electrical energy between said cathode and an anode, and said cathode;wherein the substrates are disposed around said disk-shaped cathode, and said arc of electrical energy extending between said cathode evaporative surface and said anode liberates a portion of said cathode which is subsequently deposited on the substrates.