초록 ▼

In a process for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequenc

In a process for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions and the coating contains pin-holes having a density of 30/mm.sup.2 or less.

대표청구항 ▼

[ What is claimed is:] [1.] A method for fabricating a carbon coating or a coating mainly containing carbon comprising the steps of:forming the carbon coating or the coating mainly containing carbon on a substrate by using plasma while said substrate is ultrasonic-vibrated,wherein said carbon coatin

[ What is claimed is:] [1.] A method for fabricating a carbon coating or a coating mainly containing carbon comprising the steps of:forming the carbon coating or the coating mainly containing carbon on a substrate by using plasma while said substrate is ultrasonic-vibrated,wherein said carbon coating or said coating mainly containing carbon includes pin-holes, and the number of said pin-holes is 30/mm.sup.2 or less.