초록 ▼

Method and system of rejuvenating pressurized fluid solvents used for cleaning a substrate in a pressurized vessel. A primary flow of the pressurized fluid solvent is continuously cycled from the pressurized vessel through a series of filters to remove insoluble and soluble contaminants, and then re

Method and system of rejuvenating pressurized fluid solvents used for cleaning a substrate in a pressurized vessel. A primary flow of the pressurized fluid solvent is continuously cycled from the pressurized vessel through a series of filters to remove insoluble and soluble contaminants, and then returned to the pressurized vessel. A secondary flow of the pressurized fluid solvent, preferably equivalent to less than about 40% of the primary flow, is directed either continuously or intermittently during the cleaning operation to an evaporator to evaporate the pressurized fluid solvent of the secondary flow into a vapor and to separate contaminants therefrom. The vapor from the evaporator is then either liquified by a compressor or condenser to create rejuvenated pressurized fluid solvent and redirected to the pressurized vessel for further use, or vented to atmosphere and replaced by new pressurized fluid solvent from a supply tank. Pressure equalization lines extend between a storage tank and various system components to allow solvent vapor to displace therebetween.

대표청구항 ▼

[ What is claimed is:] [1.] A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:a pressurized vessel having a chamber for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;a primary flow line extending from and in fluid commun

[ What is claimed is:] [1.] A system for cleaning a substrate using a pressurized fluid solvent, the system comprising:a pressurized vessel having a chamber for containing the substrate to be cleaned and a volume of the pressurized fluid solvent;a primary flow line extending from and in fluid communication with the chamber, the primary flow line including a pump for cycling a primary flow of the pressurized fluid solvent therethrough;at least one filter positioned along the primary flow line to remove contaminants from the pressurized fluid solvent of the primary flow, the primary flow line configured to cycle the pressurized fluid solvent of the primary flow back to the chamber after passing through the filter;a secondary flow line extending from and in fluid communication with the chamber, the secondary flow line including an evaporator to evaporate a secondary flow of the pressurized fluid solvent directed through the secondary flow line into a vapor and separate contaminants therefrom;a vent connected in fluid communication with the evaporator to vent the vapor from the evaporator to a location outside the system; anda source of new pressurized fluid solvent in fluid communication with the chamber to replace new pressurized fluid solvent into the chamber at a flow substantially equivalent to the secondary flow vented by the vent.