초록 ▼

An inspection system for inspecting products that have a flat, reflective surface, such as a wafer or a flat panel display on which a thin film is to be deposited, includes an inspection chamber connected to a processing chamber with both of the chambers being under vacuum. The inspection equipment

An inspection system for inspecting products that have a flat, reflective surface, such as a wafer or a flat panel display on which a thin film is to be deposited, includes an inspection chamber connected to a processing chamber with both of the chambers being under vacuum. The inspection equipment performs the inspection with the product in the inspection chamber without removing the product from the vacuum environment. In a preferred form of the invention, the inspection chamber includes a wall portion that will transmit light, and the inspection equipment is a laser source directed to the reflective surface of the product and a receiver for receiving reflected light to determine changes in the character of the surface caused by the deposited film or by imperfections, haze or particles.

대표청구항 ▼

[ What is claimed is:] [1.] A processing and inspection apparatus including at least one product processing chamber for processing a product under vacuum, the product having a flat surface, at least one vacuum source for maintaining the product under vacuum, and an inspection chamber under vacuum, t

[ What is claimed is:] [1.] A processing and inspection apparatus including at least one product processing chamber for processing a product under vacuum, the product having a flat surface, at least one vacuum source for maintaining the product under vacuum, and an inspection chamber under vacuum, the inspection chamber including a wall that has a portion capable of transmitting light, and inspection equipment for the product comprising a light source and reflected light receiver positioned on the exterior of said inspection chamber to direct light onto a product and receive reflected light from a product, a transfer device for transferring the product from the processing chamber to the inspection chamber, said inspection equipment being operable to carry out inspection for contaminate particles on the flat surface of a product transferred from the processing chamber to the inspection chamber while the product remains under vacuum at all times during processing, transferring and inspection of the product.