초록 ▼

A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and ports may be

A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and ports may be angled toward and aligned with a single, 2-arm pick and place robot. In a preferred embodiment of the present invention, the rotating and translating support assembly comprises a plate rotationally and translationally mounted on a shelf extending from the minienvironment adjacent to a front-opening interface port. In one embodiment, the support plate may be mounted on a shaft attached to a rotating assembly, such as for example a worm and drive gear. The rotating assembly may in turn be mounted on a translating assembly, such as for example a carriage riding on a lead screw. The rotating and translating assemblies may be controlled by a host computer, so as to rotate and translate a pod received on the support plate, to align the pod with an interface port which may be provided at an angle with respect to the front of the minienvironment.

대표청구항 ▼

[ We claim:] [1.] A rotating and translating support assembly for interfacing a front-opening pod with a front-loading interface of a minienvironment, the front-loading interface provided at a variable angle with respect to a reference plane, the rotating and translating support assembly comprising:

[ We claim:] [1.] A rotating and translating support assembly for interfacing a front-opening pod with a front-loading interface of a minienvironment, the front-loading interface provided at a variable angle with respect to a reference plane, the rotating and translating support assembly comprising:a plate for receiving and supporting the pod;a shaft fixedly mounted to an underside of said plate;rotating means for rotating said shaft and said plate;translating means, said rotating means being mounted on said translating means, said translating means capable of translating said rotating means and said plate in a horizontal plane;adjustable support pins, said adjustable support pins located under said rotating means and said translating means for supporting said plate in a horizontal position; andcontrol means for controlling said rotating means and said translating means to rotationally and translationally align the pod with the interface.