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Dual stage instrument for scanning a specimen 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-005/28
출원번호 US-0730641 (1996-10-11)
발명자 / 주소
  • Samsavar Amin
  • Wheeler William R.
  • Eaton Steven G.
출원인 / 주소
  • KLA-Tencor Corporation
대리인 / 주소
    Majestic, Parsons, Siebert & Hsue P.C.
인용정보 피인용 횟수 : 81  인용 특허 : 26

초록 ▼

A dual stage scanning instrument includes a sensor for sensing a parameter of a sample and coarse and fine stages for causing relative motion between the sensor and the sample. The coarse stage has a resolution of about 1 micrometer and the fine stage has a resolution of 1 nanometer or better. The s

대표청구항 ▼

[ What is claimed is:] [1.] An instrument for sensing a sample, comprising:a probe having a sensing tip that does not emit or transmit light for sensing a parameter of the sample;a coarse stage causing relative motion between the sensing tip and the sample;a fine stage causing relative motion betwee

이 특허에 인용된 특허 (26)

  1. Bennig Gerd K. (Richterswil CHX), Atomic force microscope and method for imaging surfaces with atomic resolution.
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  2. Hall Paul H. (Santa Barbara CA) Riley Steven A. (Santa Barbara CA) Rizos Robert G. (Buellton CA), Electromagnetic stylus force adjustment mechanism.
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  3. Elings Virgil B. (Santa Barbara CA) Gurley John A. (Santa Barbara CA), Feedback control for scanning tunnel microscopes.
    상세보기
  4. Griffith Joseph E. (Berkeley Heights NJ) Miller Gabriel L. (Westfield NJ), Force-sensing system, including a magnetically mounted rocking element.
    상세보기
  5. Washizawa Teruyoshi (Atsugi JPX) Sakai Kunihiro (Isehara JPX), Information recording and reproducing apparatus utilizing a tunneling current or interatomic forces.
    상세보기
  6. Elings Virgil B. (Santa Barbara CA) Gurley John A. (Santa Barbara CA), Jumping probe microscope.
    상세보기
  7. Wheeler ; William R. ; Kren ; George J. ; Urbanek ; Karel, Metrology instrument for measuring vertical profiles of integrated circuits.
    상세보기
  8. Wheeler William R. (Saratoga CA), Metrology instrument for measuring vertical profiles of integrated circuits and the like.
    상세보기
  9. Neukermans Armand P. (3510 Arbutus Ave. Palo Alto CA 94303) Slater Timothy G. (1226-25th Ave. San Francisco CA 94122), Micromachined torsional scanner.
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  10. Neukermans Armand P. (3510 Arbutus Ave. Palo Alto CA 94303) Slater Timothy G. (San Francisco CA), Monolithic silicon rate-gyro with integrated sensors.
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  11. Shido Shun-Ichi (Yokohama JPX) Miyazaki Toshihiko (Hiratsuka JPX) Sakai Kunihiro (Isehara JPX) Oguchi Takahiro (Atsugi JPX), Moving apparatus, a moving method and an information detection and/or input apparatus using the same.
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  12. Chamberlin Ralph V. (Tempe AZ) DiCarlo Anthony (Holladay UT), Non-contact force microscope having a coaxial cantilever-tip configuration.
    상세보기
  13. Hazard Edwin A. (Rochester NY), Oblique viewing system for microscopes.
    상세보기
  14. Fujihira Masamichi (2000-1-3-404 ; Kosugaya-cho Sakae-ku ; Yokohama-shi ; Kanagawa JPX) Muramatsu Hiroshi (Chiba JPX) Chiba Norio (Chiba JPX) Ataka Tatsuaki (Chiba JPX), Optical information read/write apparatus.
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  15. Marchman Herschel (New Providence NJ) Wetsel Grover C. (Richardson TX), Optically guided macroscopic-scan-range/nanometer resolution probing system.
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  16. Wheeler William R. (Saratoga CA), Profilometer stylus assembly insensitive to vibration.
    상세보기
  17. Breitmeier Ulrich O. (Ettlingen DEX), Scanning head.
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  18. Chiba Norio (Chiba JPX) Muramatsu Hiroshi (Chiba JPX), Scanning near-field optic/atomic force microscope in which imaging light is controlled in relation to a vibrating positi.
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  19. Elings Virgil B. (Santa Barbara CA) Gurley John A. (Santa Barbara CA), Scanning probe microscope using stored data for vertical probe positioning.
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  20. Hosoki Shigeyuki (Hachioji JPX) Hosaka Sumio (Tokyo JPX) Takata Keiji (Tokorozawa JPX), Scanning surface microscope using a micro-balance device for holding a probe-tip.
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  21. Groh Allen R. (Buffalo Grove IL) Kehl Joseph D. (Chicago IL), Stylus protection mechanism.
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  22. Olasz Joseph S. (North Kingston RI) MacIndoe William C. (West Warwick RI), Surface finish, displacement and contour scanner.
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  23. Gamble Ronald C. (Pasadena CA) West Paul E. (Cupertino CA) Schuman Marc R. (San Francisco CA), Synchronous sampling scanning force microscope.
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  24. Elings Virgil B. (Santa Barbara CA) Gurley John A. (Santa Barbara CA), Tapping atomic force microscope.
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  25. Martin Yves (Ossining NY) Wickramasinghe Hemantha K. (Chappaqua NY), Two dimensional profiling with a contact force atomic force microscope.
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  26. Morino Ronald (Seacliff NY) Conti Joseph A. (Whitestone NY), Ultrasonic stylus position stabilizer.
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