초록 ▼

A particular configuration of a compact self-aligning lift mechanism is provided for lifting the stem of a pedestal in a processing chamber while minimizing process anomalies due to geometric misalignment and binding of moving pieces. The force associated with supporting a stem in a processing chamb

A particular configuration of a compact self-aligning lift mechanism is provided for lifting the stem of a pedestal in a processing chamber while minimizing process anomalies due to geometric misalignment and binding of moving pieces. The force associated with supporting a stem in a processing chamber is routed through a first arm through a base portion of a carrier bracket where it engages a linear bearing such that the truck and track of the linear bearing absorb all forces riot aligned with the bearing. A second arm extending from the base portion, for example through a set of slots adjacent to the bearing track support member, is attached to a lift mechanism which can oppose the force from the pedestal stem such that the displacements of the first and second arms are predictable based on the force on that arm. A compliant nut is used so that the drive screw can be somewhat misaligned with the linear bearing track without causing binding, misalignment, or non-repeatability of substrate positioning during processing.

대표청구항 ▼

[ We claim:] [1.] A substrate support member stem lift system comprising:a stem carrier bracket havinga first arm supporting a stem of a substrate support member,a second arm fixed to a traveling member of a stem lift mechanism;a base portion supporting said first arm and said second arm, wherein sa

[ We claim:] [1.] A substrate support member stem lift system comprising:a stem carrier bracket havinga first arm supporting a stem of a substrate support member,a second arm fixed to a traveling member of a stem lift mechanism;a base portion supporting said first arm and said second arm, wherein said base portion is engaged with a bearing track of a support member, where said first arm and said second arm extend in a direction lateral from said bearing track, wherein said first arm is distinct from said second arm; anda bearing track support member supporting said bearing track.