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Method for formation of crystalline boron-doped silicon carbide and amorphous boron silicon oxycarbide fibers from polym 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C04B-035/56
  • C04B-035/571
출원번호 US-0019577 (1998-02-06)
발명자 / 주소
  • Bujalski Duane Ray
  • Su Kai
출원인 / 주소
  • Dow Corning Corporation
대리인 / 주소
    Brown
인용정보 피인용 횟수 : 24  인용 특허 : 10

초록

The present invention relates to a method for the formation of amorphous boron silicon oxycarbide fibers and crystalline boron-doped silicon carbide fibers comprising: preparing a blend of a siloxane resin and a boron-containing polymer, forming the blend into green fibers, and then curing and pyrol

대표청구항

[ We claim:] [1.] A method for preparing ceramic fibers comprising:i) preparing a blend comprising:a) 90 to 99.9 weight percent of a siloxane resin comprising units with a general formula R.sub.x R.sup.1.sub.y R.sup.2.sub.z SiO.sub.(4-x-y-z)/2, wherein each R is independently selected from unsaturat

이 특허에 인용된 특허 (10)

  1. Curran Dennis John Gerard,GBX, A method of making a composite ceramic fiber from pre-ceramic polymers.
  2. Paciorek Kazimiera J. L. (Corona del Mar CA) Kratzer Reinhold H. (Irvine CA) Harris David H. (Sierra Madre CA) Smythe Mark E. (Pasadena CA) Kimble Patrick F. (Corona del Mar CA), Boron nitride preceramic polymers.
  3. Johnson Robert E. (Hoboken NJ), Boron-containing ceramics through the chemical conversian of borane-containing polymers.
  4. Johnson Robert E. (Hoboken NJ), Boron-containing preceramic blend and fiber formed therefrom.
  5. Lipowitz Jonathan (Midland MI) Rabe James A. (Midland MI), Polycrystalline silicon carbide fibers.
  6. Burns Gary T. (Midland MI) Zank Gregg A. (Midland MI) Ewald Jeffrey A. (Bay City MI), Preparation of high density boron carbide ceramics with preceramic polymer binders.
  7. Lipowitz Jonathan (Midland MI) Rabe James A. (Midland MI), Preparation of polycrystalline ceramic fibers.
  8. Atwell William H. (Midland MI) Bujalski Duane R. (Bay City MI) Joffre Eric J. (Midland MI) LeGrow Gary E. (Midland MI) Lipowitz Jonathan (Midland MI) Rabe James A. (Midland MI), Preparation of substantially polycrystalline silicon carbide fibers from polyorganosiloxanes.
  9. Yajima Seishi (Ohnuki JPX) Okamura Kiyohito (Ohnuki JPX) Shishido Toetsu (Ohnuki JPX), Process for producing ceramic sintered bodies.
  10. Yajima ; Seishi ; Hayashi ; Josaburo ; Omori ; Mamoru, Silicon carbide fibers having a high strength and a method for producing said fibers.

이 특허를 인용한 특허 (24)

  1. Schmidt, Wayde R.; Sheedy, Paul; Kashyap, Tania Bhatia; Goberman, Daniel G.; Tang, Xia, Article including ceramic structure.
  2. Yu,Yongsik; Gupta,Atul; Billington,Karen; Carris,Michael; Crew,William; Mountsier,Thomas W., Boron-doped SIC copper diffusion barrier films.
  3. Keller, Teddy M; Kolel veetil, Manoj K; Qadri, Syed B, Ceramic material made from siloxane-acetylene polymer containing metal-acetylene complex.
  4. Varadarajan, Bhadri N.; Gong, Bo; Yuan, Guangbi; Gui, Zhe; Lai, Fengyuan, Densification of silicon carbide film using remote plasma treatment.
  5. Yu, Yongsik; Subramonium, Pramod; Fang, Zhiyuan; Henri, Jon; Apen, Elizabeth; Vitkavage, Dan, Diffusion barrier and etch stop films.
  6. Rangarajan, Vishwanathan; Antonelli, George Andrew; Banerji, Ananda; Van Schravendijk, Bart, Hardmask materials.
  7. Rangarajan, Vishwanathan; Antonelli, George Andrew; Banerji, Ananda; van Schravendijk, Bart, Hardmask materials.
  8. Yu, Yongsik; Billington, Karen; Tang, Xingyuan; Fu, Haiying; Carris, Michael; Crew, William, Low-K SiC copper diffusion barrier films.
  9. Yu, Yongsik; Billington, Karen; Tang, Xingyuan; Fu, Haiying; Carris, Michael; Crew, William, Low-k SiC copper diffusion barrier films.
  10. Yu, Yongsik; Gupta, Atul; Billington, Karen; Carris, Michael; Crew, William; Mountsier, Thomas W., Low-k b-doped SiC copper diffusion barrier films.
  11. Bujalski Duane Ray ; Su Kai, Method for producing ceramic fibers from blends of siloxane resins and carborane siloxane oligomers.
  12. Schmidt, Wayde R., Method of treating a preceramic material.
  13. Schmidt, Wayde R., Method of treating a preceramic material.
  14. Schmidt, Wayde R., Method of treating a preceramic material.
  15. Varadarajan, Bhadri N., Method to obtain SiC class of films of desired composition and film properties.
  16. Chattopadhyay, Kaushik; Fox, Keith; Mountsier, Tom; Wu, Hui-Jung; van Schravendijk, Bart; Branshaw, Kimberly, Methods for reducing UV and dielectric diffusion barrier interaction.
  17. Antonelli, George Andrew; Hollister, Alice; Reddy, Sirish, Oxygen-containing ceramic hard masks and associated wet-cleans.
  18. Keller, Teddy M.; Kolel Veetil, Manoj, Polymeric material made from siloxane-acetylene polymer containing metal-acetylene complex.
  19. Keller, Teddy M; Kolel-Veetil, Manoj K.; Qadri, Syed B, Pyrolytic formation of metallic nanoparticles.
  20. Wu, Hui-Jung; Shafi, Kimberly; Chattopadhyay, Kaushik; Fox, Keith; Mountsier, Tom; Dixit, Girish; van Schravendijk, Bart; Apen, Elizabeth, Reducing UV and dielectric diffusion barrier interaction through the modulation of optical properties.
  21. Varadarajan, Bhadri, Remote plasma based deposition of SiOC class of films.
  22. Shimamoto, Satoshi; Hirose, Yoshiro; Sano, Atsushi; Kamakura, Tsukasa; Noda, Takaaki, Semiconductor device manufacturing method.
  23. Yu, Yongsik; van Schravendijk, Bart J.; Shankar, Nagraj; Varadarajan, Bhadri N., Staircase encapsulation in 3D NAND fabrication.
  24. Keller, Teddy M.; Kolel Veetil, Manoj, Thermoset material made from siloxane-acetylene polymer containing metal-acetylene complex.
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