초록 ▼

This patent discloses a modular environmental control system for small cleanroom enclosures ("mini-enclosures"). Small environmental control units ("ECUs") are mounted on top of individual mini-enclosures, as near as possible to the process tool within the enclosure. Each ECU has the capability of c

This patent discloses a modular environmental control system for small cleanroom enclosures ("mini-enclosures"). Small environmental control units ("ECUs") are mounted on top of individual mini-enclosures, as near as possible to the process tool within the enclosure. Each ECU has the capability of controlling temperature, humidity, and airflow rate delivered into the enclosure. Temperature is adjusted by first cooling the air inside the ECU followed by reheating it to a selected temperature. The cooling capability is not generated by individual ECUs. Instead, a remote fluid cooling unit supplies chilled fluid to each ECU, which is circulated internally to cool the air. The same remote unit services different ECUs at the same time.

대표청구항 ▼

[ What is claimed is:] [1.] An environmental control system for providing simultaneous environmental control to a plurality of cleanroom enclosures operating in the same cleanroom environment, comprising:a fluid coolant unit ("FCU") for producing a chilled liquid fluid at a remote location relative

[ What is claimed is:] [1.] An environmental control system for providing simultaneous environmental control to a plurality of cleanroom enclosures operating in the same cleanroom environment, comprising:a fluid coolant unit ("FCU") for producing a chilled liquid fluid at a remote location relative to each cleanroom enclosure;a plurality of modular environmental control units ("ECUs"), each ECU being mounted to a cleanroom enclosure immediately above a process tool within the enclosure, and further, each unit is adapted to draw ambient air from the environment surrounding the cleanroom enclosure, adjust at least the temperature of the air to within preselected parameters, and deliver the air into the enclosure near the process tool, and whereineach ECU is adapted to receive and use the chilled liquid fluid received from the FCU to control the temperature of the air delivered to the tool.