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Method for the manufacture of a membrane-containing microstructure

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-003/00
출원번호 US-0945855 (1997-11-07)
우선권정보 SE-0002258 (1995-06-21)
국제출원번호 PCT/SE96/00789 (1996-06-17)
§371/§102 date 19971107 (19971107)
국제공개번호 WO-9701055 (1997-01-09)
발명자 / 주소
  • Ohman Ove,SEX
  • Vieider Christian,SEX
출원인 / 주소
  • Pharmacia Biotech AB, SEX
대리인 / 주소
    Birch, Stewart, Kolash & Birch, LLP
인용정보 피인용 횟수 : 106  인용 특허 : 14

초록

A method for the manufacture of a microstructure having a top face and a bottom face, at least one hole or cavity therein extending from the top face to the bottom face, and a polymer membrane which extends over a bottom opening of said hole or cavity, which method comprises the steps of: providing

대표청구항

[ I claim:] [1.] A method for the manufacture of a microstructure having a top face and a bottom face, at least one hole therein extending from the top face to the bottom face, and a polymer membrane which extends over a bottom opening of said hole, which method comprises the steps of:a) providing a

이 특허에 인용된 특허 (14)

  1. Csillag Andreas (Leingarten DT), Mask for use in production of semiconductor arrangements.
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  5. Harker Alan B. (Thousand Oaks CA) DeNatale Jeffrey F. (Thousand Oaks CA) Hood Patrick J. (Beavercreek OH) Flintoff John F. (Thousand Oaks CA), Method of fabricating of diamond moth-eye surface.
  6. Matsuzawa, Toshiharu; Douta, Kikuo; Iwayanagi, Takao; Yanazawa, Hiroshi, Method of forming a microscopic pattern.
  7. Matuo Kozo (Kyoto JPX), Method of forming patterned silicone rubber layer.
  8. Neukermans Armand P. (Palo Alto CA), Method of making superhard mechanical microstructures.
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  14. Hansson Thord (Balinge SEX) Sjolander Stefan (Uppsala SEX), Valve, especially for fluid handling bodies with microflowchannels.

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